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浏览/检索结果: 共7条，第1-7条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择发表日期升序发表日期降序提交时间升序提交时间降序题名升序题名降序作者升序作者降序 A RF plasma source with focused magnetic field for material treatment 期刊论文 PLASMA CHEMISTRY AND PLASMA PROCESSING, 2022 作者:  Zhang, L. P.;  Chang, L.;  Yuan, X. G.;  Zhang, J. H.;  Zhou, H. S. 收藏  |  浏览/下载：14/0  |  提交时间：2022/12/23 Helicon plasma  Focused magnetic field  IEDF  EEDF   Application of positive pulse to extract ions from HiPIMS ionization region 期刊论文 VACUUM, 2022, 卷号: 204, 页码: 11 作者:  Li, Liuhe;  Gu, Jiabin;  Xu Y(许亿);  Han, Mingyue;  Bilek, MarcelaMilenaMarie 收藏  |  浏览/下载：13/0  |  提交时间：2022/12/20 High power impulse magnetron sputtering  (HiPIMS)  Ions extraction method  PIC-MCC simulation  Microscopic mechanism of ions extraction   The application of a helicon plasma source in reactive sputter deposition of tungsten nitride thin films 期刊论文 Plasma Science and Technology, 2022, 卷号: 24 作者:  YANG,Yan;  JI,Peiyu;  LI,Maoyang;  YU,Yaowei;  HUANG,Jianjun 收藏  |  浏览/下载：8/0  |  提交时间：2022/12/22 helicon wave plasma  reactive sputtering  tungsten nitride  plasma diagnosis   Applying the plasma physical sputtering process to SRF cavity treatment: Simulation and Experiment Study 期刊论文 APPLIED SURFACE SCIENCE, 2022, 卷号: 574, 页码: 10 作者:  Zhu, Tongtong;  Luo, Didi;  Wu, Andong;  Tan, Teng;  Guo, Hao 收藏  |  浏览/下载：76/0  |  提交时间：2022/01/12 SRF cavities  Plasma processing  Self-consistent model  Sputtering-yield probability distribution  IEDF   Comparison of 2D Hybrid Simulational and Experimental Results for Dual-Frequency Capacitively Coupled Argon Plasmas 期刊论文 PLASMA SCIENCE & TECHNOLOGY, 2011, 卷号: 13, 页码: 181-187 作者:  Bi Zhenhua;  Xu Xiang;  Liu Yongxin;  Jiang Xiangzhan;  Lu Wenqi 收藏  |  浏览/下载：15/0  |  提交时间：2019/12/18 DF CCP  hybrid model  floating double probe  IEDF  IADF   Reconstruction of ion energy distribution function in a capacitive rf discharge 期刊论文 2010, 2010 Chen, W. C.; Zhu, X. M.; Zhang, S.; Pu, Y. K. 收藏  |  浏览/下载：5/0 Numerical simulation of super-short pulsed discharge in helium with particle-in-cell Monte Carlo collisions technique 期刊论文 CHINESE PHYSICS B, 2009, 卷号: 18, 页码: 1177-1180 作者:  Shi Feng;  Zhang Li-Li;  Wang De-Zhen 收藏  |  浏览/下载：17/0  |  提交时间：2019/12/24 high-voltage nanosecond pulse  PIC-MCC model  EEDF  IEDF