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	Reconstruction of ion energy distribution function in a capacitive rf discharge
	Chen, W. C. ; Zhu, X. M. ; Zhang, S. ; Pu, Y. K.
	2010-10-12 ; 2010-10-12
关键词	argon charge exchange discharges (electric) plasma collision processes plasma density plasma sheaths CHARGE-EXCHANGE SHEATH MODEL DYNAMICS ARGON Physics, Applied
中文摘要	A simple one-dimensional ion dynamic model with charge exchange collisions as the predominant ion-neutral reactions in the sheath is used to obtain the ion energy distribution function (IEDF) in a single-frequency collisional capacitive argon discharge. The shape of IEDF strongly depends on the electron density in this model. IEDFs predicted by this model can be in good agreement with those measured by adjusting the electron density at the ion sheath boundary. The electron densities obtained in this way are in good agreement with those from optical emission spectroscopy measurement, which also indicates the validity of the model.
语种	英语 ; 英语
出版者	AMER INST PHYSICS ; MELVILLE ; CIRCULATION & FULFILLMENT DIV, 2 HUNTINGTON QUADRANGLE, STE 1 N O 1, MELVILLE, NY 11747-4501 USA
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/78822]
专题	清华大学
推荐引用方式 GB/T 7714	Chen, W. C.,Zhu, X. M.,Zhang, S.,et al. Reconstruction of ion energy distribution function in a capacitive rf discharge[J],2010, 2010.
APA	Chen, W. C.,Zhu, X. M.,Zhang, S.,&Pu, Y. K..(2010).Reconstruction of ion energy distribution function in a capacitive rf discharge..
MLA	Chen, W. C.,et al."Reconstruction of ion energy distribution function in a capacitive rf discharge".(2010).

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