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	Comparison of 2D Hybrid Simulational and Experimental Results for Dual-Frequency Capacitively Coupled Argon Plasmas
	Bi Zhenhua; Xu Xiang; Liu Yongxin; Jiang Xiangzhan; Lu Wenqi; Wang Younian
刊名	PLASMA SCIENCE & TECHNOLOGY
	2011
卷号	13页码:181-187
关键词	DF CCP hybrid model floating double probe IEDF IADF
ISSN号	1009-0630
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4839021
专题	大连理工大学
作者单位	Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Bi Zhenhua,Xu Xiang,Liu Yongxin,et al. Comparison of 2D Hybrid Simulational and Experimental Results for Dual-Frequency Capacitively Coupled Argon Plasmas[J]. PLASMA SCIENCE & TECHNOLOGY,2011,13:181-187.
APA	Bi Zhenhua,Xu Xiang,Liu Yongxin,Jiang Xiangzhan,Lu Wenqi,&Wang Younian.(2011).Comparison of 2D Hybrid Simulational and Experimental Results for Dual-Frequency Capacitively Coupled Argon Plasmas.PLASMA SCIENCE & TECHNOLOGY,13,181-187.
MLA	Bi Zhenhua,et al."Comparison of 2D Hybrid Simulational and Experimental Results for Dual-Frequency Capacitively Coupled Argon Plasmas".PLASMA SCIENCE & TECHNOLOGY 13(2011):181-187.

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