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Formation mechanism of multi-functional black silicon based on optimized deep reactive ion etching technique with SF6/C4F8 期刊论文
science china technological sciences, 2015
Zhu FuYun; Zhang XiaoSheng; Zhang HaiXia
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/10
A THREE-STEP MODEL OF BLACK SILICON FORMATION IN DEEP REACTIVE ION ETCHING PROCESS 其他
2015-01-01
Zhu, Fuyun; Wang, Chen; Zhang, Xiaosheng; Zhao, Xin; Zhang, Haixia
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Improvement of DRIE simulation method for process development application 其他
2015-01-01
Du, Hong; Yu, Min; Qi, Lin; Zhu, Zhiyuan; Wang, Hao; Zhang, Haixia; Jin, Yufeng; Shi, Baohua; Zhang, Zhao
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Improvement of DRIE simulation method for process development application 其他
2015-01-01
Du, Hong; Yu, Min; Qi, Lin; Zhu, Zhiyuan; Wang, Hao; Zhang, Haixia; Jin, Yufeng; Shi, Baohua; Zhang, Zhao
收藏  |  浏览/下载：4/0  |  提交时间：2017/12/03
Self-Cleaning Poly(dimethylsiloxane) Film with Functional Micro/Nano Hierarchical Structures 期刊论文
langmuir, 2013
Zhang, Xiao-Sheng; Zhu, Fu-Yun; Han, Meng-Di; Sun, Xu-Ming; Peng, Xu-Hua; Zhang, Hai-Xia
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/10
Research on formation mechanism of black silicon based on matter wave 其他
2013-01-01
Wang, Chen; Zhu, Fuyun; Sun, Mingzhu; Zhang, Haixia; Zhao, Xin
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/17
Research on the hydrophobicity of black silicon based on Virtual Process 其他
2012-01-01
Li, Xin; Wang, Chen; Sun, Guangyi; Zhao, Xin; Zhang, Haixia; Lu, Guizhang
收藏  |  浏览/下载：1/0  |  提交时间：2015/11/17
硅DRIE刻蚀工艺模拟研究 期刊论文
中国电子科学研究院学报, 2011
朱福运; 于民; 金玉丰; 张海霞
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/11
Development of TSV simulator: FASTsv 其他
2011-01-01
Zhu, Fuyun; Wang, Chen; Yu, Min; Zhao, Xin; Jin, Yufeng; Zhang, Haixia
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/13
A novel bulk micromachined tunneling gyroscope 其他
2011-01-01
Wang, Lingy; Su, Yuanzhe; Lei, Y; Li, Wenwang; Liu, Yifan; Sun, Daohen; 王凌云; 刘益芳; 孙道恒
收藏  |  浏览/下载：7/0  |  提交时间：2015/07/22

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