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	Research on formation mechanism of black silicon based on matter wave
	Wang, Chen ; Zhu, Fuyun ; Sun, Mingzhu ; Zhang, Haixia ; Zhao, Xin
	2013
英文摘要	Most of research on formation mechanism of black silicon stays in the stage of experimental analysis. Consequently, it is quite difficult to perceive the mechanism of its formation process theoretically. In this paper, Quantum Mechanics is involved in our research on mechanism of how black silicon is formed in the fabrication process based on DRIE. Satisfying result is obtained through our simulation: Pillar structures with spacing raging from 500nm to 550nm can be formed when there exist particles with single momentum size in emulated experiment environment; With further efforts, more complicated pillar structures are obtained assuming that there exist particles with two sizes of momentum. By comparing with SEM image of black silicon, the simulated pillar structures are quite similar with real black silicon in both spacing and height distribution. ? 2013 Trans Tech Publications Ltd, Switzerland.; EI; 0
语种	英语
DOI标识	10.4028/www.scientific.net/KEM.562-565.902
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/411726]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wang, Chen,Zhu, Fuyun,Sun, Mingzhu,et al. Research on formation mechanism of black silicon based on matter wave. 2013-01-01.

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