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CORC

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Study on the characteristics of atomic hydrogen cleaning carbon contamination on multilayers 期刊论文
Vacuum, 2022, 卷号: 196, 页码: 11
作者:  Y. Song;  Q. P. Lu;  X. P. Gong;  D. Z. Wang;  Z. Zhang
收藏  |  浏览/下载：0/0  |  提交时间：2023/06/14
Design of off-axis multi-reflective optical system based on particle swarm optimization 期刊论文
Chinese Optics, 2021, 卷号: 14, 期号: 6, 页码: 1435-1450
作者:  Y. Wu;  L.-P. Wang;  J. Yu;  X. Zhang and C.-S. Jin
收藏  |  浏览/下载：3/0  |  提交时间：2022/06/13
Research on Surface Roughness Related Coating Processes of Mo/Si Multilayers 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2020, 卷号: 40, 期号: 10, 页码: 7
作者:  S. Sun,C. Jin,B. Yu,T. Guo,S. Yao,C. Li and W. Deng
收藏  |  浏览/下载：2/0  |  提交时间：2021/07/06
Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 32, 页码: 10185-10193
作者:  Y. Wu,L. P. Wang,J. Yu,B. Yu and C. S. Jin
收藏  |  浏览/下载：3/0  |  提交时间：2021/07/06
Nonuniform self-imaging of achromatic Talbot lithography 期刊论文
CHINESE OPTICS LETTERS, 2019, 卷号: 17, 期号: 6, 页码: -
作者:  Xia, HJ;  Yang, SM;  Wang, LS;  Zhao, J;  Xue, CF
收藏  |  浏览/下载：13/0  |  提交时间：2020/10/16
Quality evaluation of solar magnetic field images at EUV wavelengths in digital image correlation method 期刊论文
Journal of Computational Methods in Sciences and Engineering, 2019, 卷号: 19, 期号: 4, 页码: 1109-1123
作者:  Y.Liu;  K.-F.Song;  J.-L.Ma;  X.-D.Wang;  Z.-W.Han
收藏  |  浏览/下载：0/0  |  提交时间：2020/08/24
Modeling multilayer coating profiles with defects on EUV collector with grating 期刊论文
Optical Engineering, 2019, 卷号: 58, 期号: 10, 页码: 9
作者:  S.Z.Sun;  C.S.Jin;  B.Yu;  T.Guo;  S.Yao
收藏  |  浏览/下载：3/0  |  提交时间：2020/08/24
Theoretical determination of energies, wavelengths, and transition probabilities for EUV and SXR spectral lines in Rb XXXIV, Sr XXXV, Zr XXXVII, and Nb XXXVIII 期刊论文
Journal of Quantitative Spectroscopy & Radiative Transfer, 2019, 卷号: 225, 期号: 225, 页码: 76-83
作者:  Sang CC(桑萃萃)
收藏  |  浏览/下载：2/0  |  提交时间：2020/11/13
Molecular Glass Photoresists with High Resolution, Low LER, and High Sensitivity for EUV Lithography 期刊论文
MACROMOLECULAR MATERIALS AND ENGINEERING, 2018, 卷号: 303, 期号: 6
作者:  Peng, Xiaoman;  Wang, Yafei;  Xu, Jian;  Yuan, Hua;  Wang, Liangqian
收藏  |  浏览/下载：31/0  |  提交时间：2019/04/09
Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 10, 页码: 2395-2406
作者:  Kuang, Shang-Qi;  Li, Shuo;  Yang, Hai-Gui;  Huo, Tong-Lin;  Zhou, Hong-Jun
收藏  |  浏览/下载：7/0  |  提交时间：2019/09/17

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