Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view

doi:10.1364/ao.409561

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	Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view
	Y. Wu,L. P. Wang,J. Yu,B. Yu and C. S. Jin
刊名	Applied Optics
	2020
卷号	59 期号:32 页码:10185-10193
ISSN号	1559-128X
DOI	10.1364/ao.409561
英文摘要	This paper proposes a grouping design method based on a combination of spatial ray tracing and aberration correction to construct the initial structure for an off-axis multi-reflective aspheric optical system. This method establishes a mathematical parameter model of the optical system to satisfy the aberration balance and multi-constraint control requirements. The simulated annealing particle swarm algorithm is applied to calculate the initial optical system structure. Finally, an extreme ultraviolet (EUV) lithography projection objective with six-reflective aspheric mirrors is used as an example to verify the reliability and effectiveness of this method. A 0.33 numerical aperture EUV lithographic objective with wavefront error better than 1/70 lambda(lambda = 13.5 nm) root mean square (RMS) is obtained. (C) 2020 Optical Society of America
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/64414]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Wu,L. P. Wang,J. Yu,B. Yu and C. S. Jin. Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view[J]. Applied Optics,2020,59(32):10185-10193.
APA	Y. Wu,L. P. Wang,J. Yu,B. Yu and C. S. Jin.(2020).Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view.Applied Optics,59(32),10185-10193.
MLA	Y. Wu,L. P. Wang,J. Yu,B. Yu and C. S. Jin."Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view".Applied Optics 59.32(2020):10185-10193.