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科研机构
西安交通大学 [6]
内容类型
会议论文 [3]
期刊论文 [3]
发表日期
2015 [1]
2014 [1]
2011 [1]
2010 [3]
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专题:西安交通大学
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Optical micro-electro-mechanical-system pressure sensor based on light intensity modulation
期刊论文
Micro & Nano Letters, 2015, 卷号: 10, 期号: [db:dc_citation_issue], 页码: 491-495
作者:
Zhao, Yulong
;
Li, Cun
;
Hao, Mengmeng
;
Cheng, Rongjun
;
Fan, Xiaole
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
thin film
finite element method
flammable areas
fibre conducts
light intensity modulation
silicon compounds
microsensors
bulk micromachining technology
optical microelectromechanical-system pressure sensor
combustible areas
optical cables
intensity modulation
pressure sensors
silicon diaphragm deformation
micromachining
pressure measurement
finite element analysis
optical cable
reflected light intensity shift
pressure 0 MPa to 20 MPa
signal transmission
photoelectric detection circuit
micro-optomechanical devices
elemental semiconductors
optical modulation
thin films
source light
silicon
fibre optic sensors
Packaging a piezoresistive pressure sensor for intracranial pressure monitoring
会议论文
作者:
Meng, Xiawei
;
Zhao, Yulong
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
Biomedical applications
Implantable sensors
Intra-cranial pressure
Miniaturization
Piezo-resistive
Piezoresistive pressure sensors
Silicon bulk micromachining technology
Single-crystal silicon wafers
The design and fabrication of high pressure sensor based on SOI wafer
期刊论文
Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology, 2011, 卷号: 43, 期号: [db:dc_citation_issue], 页码: 352-354
作者:
Tian, Bian
;
Zhao, Yu-Long
;
Jiang, Zhuang-De
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/10
High linearity
High pressure
High pressure sensors
High temperature
High-pressure and temperatures
Piezo-resistive sensors
Silicon on insulator wafers
Thick membranes
Inverted-Cup High-Temperature and High-Frequency Piezoresistive Pressure Sensor
期刊论文
Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University, 2010, 卷号: 44, 期号: [db:dc_citation_issue], 页码: 50-54
作者:
Zhao, Libo
;
Zhao, Yulong
;
Li, Jianbo
;
Liang, Jianqiang
;
Li, Yong
收藏
  |  
浏览/下载:1/0
  |  
提交时间:2019/12/10
Flush-type
High-temperature adhesives
Micro electromechanical system (MEMS)
Micro electro mechanical system
Piezo-resistive
Piezoresistive pressure sensors
Pre-tightening forces
Silicon on insulator (SOI)
The intelligent pressure sensor system based on DSP
会议论文
作者:
Yang, Chuan
;
Li, Chen
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  |  
浏览/下载:4/0
  |  
提交时间:2019/12/18
Control and automation
Diffused silicon
High-precision
Industrial control computer
Intelligent pressure sensor
Intelligent sensors
Pressure and temperature
Temperature drifts
The application of RBF neural network in the compensation for temperature drift of the silicon pressure sensor
会议论文
作者:
Yang, Chuan
;
Li, Chen
;
Zhang, Chao
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/18
Diffused silicon
RBF Neural Network
Silicon pressure sensors
Temperature characteristic
Temperature drifts
Two-dimension
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