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	The design and fabrication of high pressure sensor based on SOI wafer
	Tian, Bian; Zhao, Yu-Long; Jiang, Zhuang-De
刊名	Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology
	2011
卷号	43期号:[db:dc_citation_issue]页码:352-354
关键词	High linearity High pressure High pressure sensors High temperature High-pressure and temperatures Piezo-resistive sensors Silicon on insulator wafers Thick membranes
ISSN号	0367-6234
DOI	[db:dc_identifier_doi]
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4492751
专题	西安交通大学
推荐引用方式 GB/T 7714	Tian, Bian,Zhao, Yu-Long,Jiang, Zhuang-De. The design and fabrication of high pressure sensor based on SOI wafer[J]. Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology,2011,43([db:dc_citation_issue]):352-354.
APA	Tian, Bian,Zhao, Yu-Long,&Jiang, Zhuang-De.(2011).The design and fabrication of high pressure sensor based on SOI wafer.Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology,43([db:dc_citation_issue]),352-354.
MLA	Tian, Bian,et al."The design and fabrication of high pressure sensor based on SOI wafer".Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology 43.[db:dc_citation_issue](2011):352-354.

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