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科研机构
上海大学 [22]
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期刊论文 [19]
会议论文 [3]
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2019 [1]
2018 [2]
2017 [4]
2016 [5]
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专题:上海大学
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Preparation of ellipsoidal rod-shaped silica nanocomposite abrasives by Chromium ion/PEG200 induced method for sapphire substrates chemical mechanical polishing
期刊论文
JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 卷号: 777, 页码: 1294-1303
作者:
Dong, Yue[1]
;
Lei, Hong[2]
;
Liu, Wenqing[3]
;
Chen, Yi[4]
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2019/04/22
Ellipsoidal rod-shaped silica nanocomposite abrasives
Chemical mechanical polishing
Polishing mechanism
Sapphire substrates
Preparation of -alumina/silica core-shell abrasives and their chemical mechanical polishing performances on sapphire substrates
期刊论文
MICRO & NANO LETTERS, 2018, 卷号: 13, 页码: 1315-1320
作者:
Wang, Xin[1]
;
Lei, Hong[2]
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/04/22
scanning electron microscopy
abrasives
surface roughness
friction
X-ray photoelectron spectra
abrasion
secondary ion mass spectra
silicon compounds
alumina
transmission electron microscopy
chemical mechanical polishing
composite materials
materials preparation
time of flight mass spectra
surface morphology
sapphire
core-shell structure
time-of-flight secondary ion mass spectroscopy
scanning electron microscopy
transmission electron microscopy
sapphire substrates
che
Preparation of non-spherical silica composite abrasives by lanthanum ion-induced effect and its chemical-mechanical polishing properties on sapphire substrates
期刊论文
JOURNAL OF MATERIALS SCIENCE, 2018, 卷号: 53, 页码: 10732-10742
作者:
Dong, Yue[1]
;
Lei, Hong[2]
;
Liu, Wenqing[3]
;
Wang, Tianxian[4]
;
Xu, Lei[5]
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/04/22
Preparation of Ag2O modified silica abrasives and their chemical mechanical polishing performances on sapphire
期刊论文
FRICTION, 2017, 卷号: 5, 页码: 429-436
作者:
Zhang, Baichun[1]
;
Lei, Hong[2]
;
Chen, Yi[3]
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/04/24
chemical mechanical polishing
Ag-doped colloidal silica abrasive
sapphire
material removal rate
CMP behavior of alumina/metatitanic acid core-shell abrasives on sapphire substrates
期刊论文
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2017, 卷号: 50, 页码: 263-268
作者:
Wang, Xin[1]
;
Lei, Hong[2]
;
Chen, Ruling[3]
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/04/24
Chemical mechanical polishing (CMP)
alpha-Al2O3/TiO(OH)(2) core-shell abrasives
Sapphire
Mechanism
Nd3+-doped colloidal SiO2 composite abrasives: Synthesis and the effects on chemical mechanical polishing (CMP) performances of sapphire wafers
期刊论文
APPLIED SURFACE SCIENCE, 2017, 卷号: 413, 页码: 16-26
作者:
Liu, Tingting[1]
;
Lei, Hong[2]
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/04/24
Nd3+-doped colloidal SiO2 composite abrasives
Chemical mechanical polishing (CMP)
Sapphire
Material removal rate (MRR)
Synthesis of Zn-doped colloidal SiO2 abrasives and their applications in sapphire chemical mechanical polishing slurry
期刊论文
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2017, 卷号: 28, 页码: 1229-1237
作者:
Lei, Hong[1]
;
Huang, LiQin[2]
;
Gu, Qian[3]
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/04/24
Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates
期刊论文
MATERIALS CHEMISTRY AND PHYSICS, 2016, 卷号: 172, 页码: 26-31
作者:
Lei, Hong[1]
;
Tong, Kaiyu[2]
;
Wang, Zhanyong[3]
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/04/26
Composite materials
Chemical synthesis
Surfaces
X-ray photo-emission spectroscopy (XPS)
Preparation of La-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates
期刊论文
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2016, 卷号: 44, 页码: 124-130
作者:
Lei, Hong[1]
;
Tong, Kaiyu[2]
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/04/26
CMP
SiO2 composite abrasives
Sapphire
Solid-state reaction
Preparation of Monodisperse Ti-Doped Colloidal SiO2 Composite Abrasives and Their Chemical Mechanical Polishing Performances on Sapphire Substrates
期刊论文
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2016, 卷号: 5, 页码: P674-P679
作者:
Lei, Hong[1]
;
Tong, Kaiyu[2]
;
Zhang, Baichun[3]
;
Chen, Yi[4]
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/04/26
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