Synthesis of Zn-doped colloidal SiO2 abrasives and their applications in sapphire chemical mechanical polishing slurry | |
Lei, Hong[1]; Huang, LiQin[2]; Gu, Qian[3] | |
刊名 | JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS |
2017 | |
卷号 | 28页码:1229-1237 |
ISSN号 | 0957-4522 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2192894 |
专题 | 上海大学 |
作者单位 | 1.[1]Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China. 2.Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China. 3.[2]Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China. 4.Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China. 5.[3]Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China. |
推荐引用方式 GB/T 7714 | Lei, Hong[1],Huang, LiQin[2],Gu, Qian[3]. Synthesis of Zn-doped colloidal SiO2 abrasives and their applications in sapphire chemical mechanical polishing slurry[J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,2017,28:1229-1237. |
APA | Lei, Hong[1],Huang, LiQin[2],&Gu, Qian[3].(2017).Synthesis of Zn-doped colloidal SiO2 abrasives and their applications in sapphire chemical mechanical polishing slurry.JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,28,1229-1237. |
MLA | Lei, Hong[1],et al."Synthesis of Zn-doped colloidal SiO2 abrasives and their applications in sapphire chemical mechanical polishing slurry".JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS 28(2017):1229-1237. |
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