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	Preparation of ellipsoidal rod-shaped silica nanocomposite abrasives by Chromium ion/PEG200 induced method for sapphire substrates chemical mechanical polishing
	Dong, Yue[1]; Lei, Hong[2]; Liu, Wenqing[3]; Chen, Yi[4]
刊名	JOURNAL OF ALLOYS AND COMPOUNDS
	2019
卷号	777页码:1294-1303
关键词	Ellipsoidal rod-shaped silica nanocomposite abrasives Chemical mechanical polishing Polishing mechanism Sapphire substrates
ISSN号	0925-8388
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2164314
专题	上海大学
作者单位	1.[1]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China. 2.Shanghai Univ, Res Ctr Nano Sci & Technol, Shanghai 200444, Peoples R China. 3.[2]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China. 4.Shanghai Univ, Res Ctr Nano Sci & Technol, Shanghai 200444, Peoples R China. 5.[3]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China. 6.[4]Shanghai Univ, Res Ctr Nano Sci & Technol, Shanghai 200444, Peoples R China.
推荐引用方式 GB/T 7714	Dong, Yue[1],Lei, Hong[2],Liu, Wenqing[3],et al. Preparation of ellipsoidal rod-shaped silica nanocomposite abrasives by Chromium ion/PEG200 induced method for sapphire substrates chemical mechanical polishing[J]. JOURNAL OF ALLOYS AND COMPOUNDS,2019,777:1294-1303.
APA	Dong, Yue[1],Lei, Hong[2],Liu, Wenqing[3],&Chen, Yi[4].(2019).Preparation of ellipsoidal rod-shaped silica nanocomposite abrasives by Chromium ion/PEG200 induced method for sapphire substrates chemical mechanical polishing.JOURNAL OF ALLOYS AND COMPOUNDS,777,1294-1303.
MLA	Dong, Yue[1],et al."Preparation of ellipsoidal rod-shaped silica nanocomposite abrasives by Chromium ion/PEG200 induced method for sapphire substrates chemical mechanical polishing".JOURNAL OF ALLOYS AND COMPOUNDS 777(2019):1294-1303.

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