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兰州理工大学 [4]

西安交通大学 [3]

大连理工大学 [1]

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	Modification of a-C:H films via nitrogen and silicon doping: The way to the superlubricity in moisture atmosphere 期刊论文 Diamond and Related Materials, 2020, 卷号: 107 作者: Wang, Kai; Yang, Baoping; Zhang, Bin; Bai, Changning; Mou, Zhixing 收藏 \| 浏览/下载：6/0 \| 提交时间：2020/11/14 Carbon films Chemical bonds Chromium compounds Dangling bonds Debris Friction Hematite Moisture Nitrogen Plasma CVD Plasma enhanced chemical vapor deposition Semiconductor doping Silicon compounds Wear of materials Element distribution Friction force Hydrogenated carbon films Open atmosphere Plasma enhanced chemical vapor depositions (PE CVD) Si (100) substrate Silicon doping Sliding conditions
	Modification of a-C:H films via nitrogen and silicon doping: The way to the superlubricity in moisture atmosphere 会议论文作者: Wang, Kai; Yang, Baoping; Zhang, Bin; Bai, Changning; Mou, Zhixing 收藏 \| 浏览/下载：6/0 \| 提交时间：2020/12/18 Carbon films Chemical bonds Chromium compounds Dangling bonds Debris Friction Hematite Moisture Nitrogen Plasma CVD Plasma enhanced chemical vapor deposition Semiconductor doping Silicon compounds Wear of materialsElement distribution Friction force Hydrogenated carbon films Open atmosphere Plasma enhanced chemical vapor depositions (PE CVD) Si (100) substrate Silicon doping Sliding conditions
	Modification of a-C:H films via nitrogen and silicon doping: The way to the superlubricity in moisture atmosphere 期刊论文 Diamond and Related Materials, 2020, 卷号: 107 作者: Wang, Kai; Yang, Baoping; Zhang, Bin; Bai, Changning; Mou, Zhixing 收藏 \| 浏览/下载：8/0 \| 提交时间：2022/02/17 Carbon films Chemical bonds Chromium compounds Dangling bonds Debris Friction Hematite Moisture Nitrogen Plasma CVD Plasma enhanced chemical vapor deposition Semiconductor doping Silicon compounds Wear of materials Element distribution Friction force Hydrogenated carbon films Open atmosphere Plasma enhanced chemical vapor depositions (PE CVD) Si (100) substrate Silicon doping Sliding conditions
	Efficient and controllable growth of vertically oriented graphene nanosheets by mesoplasma chemical vapor deposition 期刊论文 CARBON, 2019, 卷号: 147, 页码: 341-347 作者: Zhang, Huan; Wu, Sudong; Lu, Ziyu; Chen, Xinchun; Chen, Qixian 收藏 \| 浏览/下载：25/0 \| 提交时间：2019/12/02 Aspect ratio Graphene Growth rate Nanosheets Plasma enhanced chemical vapor deposition, Controllable growth Controllable structures Deposition precursors Graphene nanosheets High-quality films Nano-architecture Plasma enhanced chemical vapor depositions (PE CVD) Structure transitions, Plasma CVD
	Broadband antireflection coating for the near-infrared InAs/GaSb Type-II superlattices photodetectors by lift-off process 会议论文作者: Jia, Qing-Xuan; Guo, Chun-Yan; Sun, Yao-Yao; Yang, Cheng-Ao; Lv, Yue-Xi 收藏 \| 浏览/下载：10/0 \| 提交时间：2019/11/26 Anti-reflection Broadband anti reflections Broadband AR coatings Inas/gasb type-ii superlattices Infrared photodetector Lift-off process Lift-off technology Plasma enhanced chemical vapor depositions (PE CVD)
	Investigation of the interface traps and current collapse in LPCVD SiNx/AlGaN/GaN MISHEMTs 会议论文作者: Yu, Kun; Liu, Chao; Jiang, Huaxing; Lu, Xing; Lau, Kei May 收藏 \| 浏览/下载：7/0 \| 提交时间：2019/11/26 AlGaN/GaN MIS-HEMTs Current collapse I-V measurements Interface traps LPCVD SiNx Metal insulator semiconductor high electron mobility transistors (MISHEMT) Passivation layer Plasma enhanced chemical vapor depositions (PE CVD)
	Fabrication of a pendulous resonant micro-machined biosensor for direct liquid detection 会议论文作者: Huang, Gang; Li, Yuxin; Qian, Li; Li, Qi 收藏 \| 浏览/下载：3/0 \| 提交时间：2019/12/02 Buried oxide layers Device fabrications Differential output Energy compensation Plasma enhanced chemical vapor depositions (PE CVD) Resonant paddle SOI-MEMS Torsional modes
	Influence of working pressure on structure and properties of diamond-like carbon films 期刊论文 Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2014, 卷号: 43, 期号: 6, 页码: 1878-1882 作者: Ling, Xiao; Yu, Shurong; Zhang, Junyan 收藏 \| 浏览/下载：0/0 \| 提交时间：2020/11/14 Carbon films Diamonds Mechanical properties Plasma CVD Plasma enhanced chemical vapor deposition Scanning electron microscopy Structure (composition) Tribology 316 L stainless steel Diamond like carbon Microstructures and properties Plasma enhanced chemical vapor depositions (PE CVD) Properties Structure and properties Tribological properties Working pressures

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