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Band-Edge Work Function Obtained by Plasma Doping TiN Metal Gate for nMOS Device Application 期刊论文
IEEE TRANSACTIONS ON ELECTRON DEVICE, 2018
作者:  Shan Tang;  Tao GL(陶桂龙);  Li JF(李俊峰);  Zhu HL(朱慧珑);  Wang XL(王晓磊)
收藏  |  浏览/下载:27/0  |  提交时间:2019/05/20
FOI FinFET with Ultra-low Parasitic Resistance Enabled by Fully Metallic Source and Drain Formation on Isolated Bulk-Fin 会议论文
作者:  Wu ZH(吴振华);  Luo J(罗军);  Meng LK(孟令款);  Zhang QZ(张青竹);  Li YD(李昱东)
收藏  |  浏览/下载:32/0  |  提交时间:2017/05/19
Attainment of dual-band edge work function by using a single metal gate and single high-k dielectric via ion implantation for HP CMOS device 期刊论文
Solid-State Electronics, 2016
作者:  Xu GB(许高博);  Zhou HJ(周华杰);  Zhu HL(朱慧珑);  Liu JB(刘金彪);  Wang Y(王垚)
收藏  |  浏览/下载:26/0  |  提交时间:2017/05/09
Ion-Implanted TiN Metal Gate With Dual Band-Edge Work Function and Excellent Reliability for Advanced CMOS Device Applications 期刊论文
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2015
作者:  Zhu HL(朱慧珑);  Liang QQ(梁擎擎);  Liu JB(刘金彪);  Li JF(李俊峰);  Xiang JJ(项金娟)
收藏  |  浏览/下载:11/0  |  提交时间:2016/05/31
Investigation of TaN as the wet etch stop layer for HKMG-last integration in the 22 nm and beyond nodes CMOS technology 期刊论文
Vacuum, 2015
作者:  Cui HS(崔虎山);  Luo J(罗军);  Xu J(许静);  Gao JF(高建峰);  Xiang JJ(项金娟)
收藏  |  浏览/下载:20/0  |  提交时间:2016/05/31
Device parameter optimization for sub-20 nm node HK/MG-last bulk FinFETs 期刊论文
Journal of Semiconductors, 2015
作者:  Zhao ZG(赵治国);  Luo J(罗军);  Yang H(杨红);  Meng LK(孟令款);  Hong PZ(洪培真)
收藏  |  浏览/下载:32/0  |  提交时间:2016/05/31


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