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The effects of electron surface interactions in geometrically symmetric capacitive RF plasmas in the presence of different electrode surface materials
期刊论文
PHYSICS OF PLASMAS, 2019, 卷号: 26
作者:
Sun, Jing-Yu
;
Wen, De-Qi
;
Zhang, Quan-Zhi
;
Liu, Yong-Xin
;
Wang, You-Nian
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2019/12/02
Copper compounds
Electric discharges
Electric grounding
Electrodes
Ionization
Plasma simulation
Secondary emission
Silica
Silicon oxides, Asymmetric response
Backscattered electrons
Capacitively coupled plasmas
Grounded electrodes
Plasma characteristics
Secondary electron emissions
Secondary electron yield
Secondary electrons, Electrons
Striations in dual-frequency capacitively coupled CF4 plasmas: the role of the high-frequency voltage amplitude
期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2019, 卷号: 28
作者:
Liu, Yong-Xin
;
Donko, Zoltan
;
Korolov, Ihor
;
Schungel, Edmund
;
Wang, You-Nian
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2019/12/02
striations
electronegative plasma
low pressure
capacitively coupled RF discharge
Study on Effect of Neutral Gas Pressure on Plasma Characteristics in Capacitive RF Argon Glow Discharges at Low Pressure by Fluid Modeling
期刊论文
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2018, 卷号: 46, 页码: 1738-1746
作者:
Samir, Tagra
;
Liu, Yue
;
Zhao, Lulu
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/12/02
Capacitively coupled
ohmic heating
plasma discharge
Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency
期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2017, 卷号: 26
作者:
Liu, Yong-Xin
;
Korolov, Ihor
;
Schuengel, Edmund
;
Wang, You-Nian
;
Donko, Zoltan
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
striations
electronegative gas
capacitively coupled rf plasma
PROES
PIC/MCC simulation
ion-ion plasma model
Hybrid Modeling of SiH4/Ar Discharge in a Pulse Modulated RF Capacitively Coupled Plasma
会议论文
68th Gaseous Electronics Conference
作者:
Song YH(宋远红)
;
Wang YN(王友年)
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/09
A One-Dimensional Hybrid Simulation of DC/RF Combined Driven Capacitive Plasma
期刊论文
PLASMA SCIENCE & TECHNOLOGY, 2012, 卷号: 14, 页码: 32-36
作者:
Wang Shuai
;
Xu Xiang
;
Wang Younian
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/13
capacitively coupled plasmas
DC/RF combined driven
hybrid model
IEDs
IADs
Electron density and ion energy dependence on driving frequency in capacitively coupled argon plasmas
期刊论文
2010, 2010
Xi-Ming Zhu
;
Wen-Cong Chen
;
Shu Zhang
;
Zhi-Gang Guo
;
Da-Wei Hu
;
Yi-Kang Pu
收藏
  |  
浏览/下载:6/0
Electron density and ion energy dependence on driving frequency in capacitively coupled argon plasmas
期刊论文
2010, 2010
Zhu, Xi-Ming
;
Chen, Wen-Cong
;
Zhang, Shu
;
Guo, Zhi-Gang
;
Hu, Da-Wei
;
Pu, Yi-Kang
收藏
  |  
浏览/下载:5/0
Comparative Study of the Superhydrophobic-Modification of Silicone Rubber Surfaces by CF4 ICP and CCP
期刊论文
PLASMA PROCESSES AND POLYMERS, 2009, 卷号: 6, 期号: 8, 页码: 530-536
作者:
Gao, Song-Hua
;
Zhou, Ke-Sheng
;
Lei, Ming-Kai
;
Wen, Li-Shi
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2021/02/02
AFM
CF4 ICP and CCP
silicon rubber
superhydrophobic modification
surface modification
XPS
Improvement of surface hydrophobicity on silicone rubber modified by CF4 radio frequency capacitively coupled plasma
期刊论文
JOURNAL OF CENTRAL SOUTH UNIVERSITY OF TECHNOLOGY, 2009, 卷号: 16, 期号: 3, 页码: 365-370
作者:
Gao Song-hua
;
Zhou Ke-sheng
;
Wen Li-shi
收藏
  |  
浏览/下载:0/0
  |  
提交时间:2021/02/02
surface hydrophobicity
silicone rubber
radio frequency capacitively coupled plasma
static contact angle
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