| Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency | |
| Liu, Yong-Xin; Korolov, Ihor; Schuengel, Edmund; Wang, You-Nian; Donko, Zoltan; Schulze, Julian | |
| 刊名 | PLASMA SOURCES SCIENCE & TECHNOLOGY
 |
| 2017 | |
| 卷号 | 26 |
| 关键词 | striations electronegative gas capacitively coupled rf plasma PROES PIC/MCC simulation ion-ion plasma model |
| ISSN号 | 0963-0252 |
| URL标识 | 查看原文 |
| WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3283388 |
| 专题 | 大连理工大学 |
| 作者单位 | 1.Dalian Univ Technol, Sch Phys & Optoelectron Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China. 2.Univ Houston, Dept Chem & Biomol Engn, Plasma Proc Lab, Houston, TX 77204 USA. 3.Hungarian Acad Sci, Wigner Res Ctr Phys, Inst Solid State Phys & Opt, Konkoly Thege Miklos Str 29-33, H-1121 Budapest, Hungary. 4.West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA. 5.Evatec AG, Hauptstr 1a, CH-9477 Truebbach, Switzerland. 6.Dalian Univ Technol, Sch Phys & Optoelectron Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China. 7.West Virginia Univ, Dept Phys, Morgantown, WV 26506 USA. 8.Ruhr Univ Bochum, Inst Elect Engn, D-44801 Bochum, Germany. |
| 推荐引用方式 GB/T 7714 | Liu, Yong-Xin,Korolov, Ihor,Schuengel, Edmund,et al. Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency[J]. PLASMA SOURCES SCIENCE & TECHNOLOGY,2017,26. |
| APA | Liu, Yong-Xin,Korolov, Ihor,Schuengel, Edmund,Wang, You-Nian,Donko, Zoltan,&Schulze, Julian.(2017).Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency.PLASMA SOURCES SCIENCE & TECHNOLOGY,26. |
| MLA | Liu, Yong-Xin,et al."Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency".PLASMA SOURCES SCIENCE & TECHNOLOGY 26(2017). |
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