CORC

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CORC

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Effect of geometry error on accuracy of large-diameter pads used for CMP dressing 期刊论文
International Journal of Advanced Manufacturing Technology, 2019, 卷号: 100, 页码: 1505-1520
作者:  Ban, X.X.;  Zhao, H.Y.;  Zhao, S.J.;  Xie, R.Q.;  Gu, Y.W.
收藏  |  浏览/下载：14/0  |  提交时间：2019/11/19
Physically-based modeling of pad-asperity scale chemical-mechanical synergy in chemical mechanical polishing 期刊论文
TRIBOLOGY INTERNATIONAL, 2019, 卷号: 138, 页码: 307-315
作者:  Wang, Lin;  Zhou, Ping;  Yan, Ying;  Kang, Renke;  Guo, Dongming
收藏  |  浏览/下载：7/0  |  提交时间：2019/12/02
Environment friendly chemical mechanical polishing of copper 期刊论文
APPLIED SURFACE SCIENCE, 2019, 卷号: 467, 页码: 5-11
作者:  Zhang, Zhenyu;  Cui, Junfeng;  Zhang, Jiabo;  Liu, Dongdong;  Yu, Zhijian
收藏  |  浏览/下载：11/0  |  提交时间：2019/12/02
Cu  COS  CMP  H2O2  Chelating  
Atomistic mechanisms of chemical mechanical polishing of diamond (100) in aqueous H2O2/pure H2O: Molecular dynamics simulations using reactive force field (ReaxFF) 期刊论文
COMPUTATIONAL MATERIALS SCIENCE, 2019, 卷号: 157, 页码: 99-106
作者:  Guo, Xiaoguang;  Yuan, Song;  Wang, Xiaoli;  Jin, Zhuji;  Kang, Renke
收藏  |  浏览/下载：24/0  |  提交时间：2019/12/02
Investigation of effects of pattern structures arrangement on chemical mechanical polishing process 会议论文
Shanghai, China, March 11, 2018 - March 12, 2018
作者:  Wu, Lixiao;  Hahn, Sookap;  Yan, Changfeng
收藏  |  浏览/下载：1/0  |  提交时间：2020/11/15
Atomistic mechanisms of Cu CMP in aqueous H2O2: Molecular dynamics simulations using ReaxFF reactive force field 期刊论文
COMPUTATIONAL MATERIALS SCIENCE, 2018, 卷号: 155, 页码: 476-482
作者:  Guo, Xiaoguang;  Wang, Xiaoli;  Jin, Zhuji;  Kang, Renke
收藏  |  浏览/下载：5/0  |  提交时间：2019/12/02
Improvement and application of pad conditioning accuracy in chemical mechanical polishing 期刊论文
Optical Engineering, 2018, 卷号: 57
作者:  Ban, Xinxing;  Zhao, Huiying;  Zhu, Xueliang;  Zhao, Shijie;  Xie, Ruiqing
收藏  |  浏览/下载：5/0  |  提交时间：2019/11/26
Effect of motion accuracy on material removal during the CMP process for large-aperture plane optics 期刊论文
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2018, 卷号: 94, 页码: 105-119
作者:  Zhang, C. P.;  Zhao, H. Y.;  Xie, R. Q.;  Zhao, Z. X.;  Gu, Y. W.
收藏  |  浏览/下载：3/0  |  提交时间：2019/11/26
A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry 期刊论文
APPLIED SURFACE SCIENCE, 2018, 卷号: 427, 页码: 409-415
作者:  Zhang, Zhenyu;  Shi, Zhifeng;  Du, Yuefeng;  Yu, Zhijian;  Guo, Liangchao
收藏  |  浏览/下载：150/0  |  提交时间：2018/12/04
A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry 期刊论文
APPLIED SURFACE SCIENCE, 2018, 卷号: 427, 页码: 409-415
作者:  Yu, Zhijian;  Guo, Dongming;  Guo, Liangchao;  Du, Yuefeng;  Shi, Zhifeng
收藏  |  浏览/下载：152/0  |  提交时间：2018/12/04

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