A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry

CORC > 宁波材料技术与工程研究所 > 中国科学院宁波材料技术与工程研究所 > 2018专题

	A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry
	Yu, Zhijian; Guo, Dongming; Guo, Liangchao; Du, Yuefeng; Shi, Zhifeng; Zhang, Zhenyu
刊名	APPLIED SURFACE SCIENCE
	2018
卷号	427 页码:409-415
关键词	Commercially Pure Titanium Ti-6al-4v Ti Fatigue Deposition Surface Layer Steel Films
英文摘要	In this study, a novel approach of CMP is developed using an environment-friendly slurry consisting of silica, hydrogen peroxide (H2O2), malic acid and deionized water. This is different from the traditional polishing, in which hazardous chemicals are used for Ti alloys. The surface roughness R-a of 0.68 nm is obtained over a measurement area of 70 x 53 mu m(2), which is lower than those previously reported for a Ti alloy. This is polished by the developed optimal CMP slurry. Polishing mechanism is investigated using electrochemical and X-ray photoelectron (XPS) measurements. H2O2 dominates the corrosion process during CMP using the developed environment-friendly slurry. Corrosion current of H2O2 is consistent with the reactants of titania, alumina and vanadia formed on the surfaces of Ti-6Al-4 V after CMP. Corrosion potential agrees well with the polished surface quality of Ti-6Al-4 V. Chemical reaction equations are proposed according to the electrochemical and XPS measurements. The developed CMP slurry sheds light on the application in environment protection for the Ti, Ti alloys and CMP industries. (C) 2017 Elsevier B.V. All rights reserved.
学科主题	Electrochemistry
语种	英语
公开日期	2018-12-04
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/16957]
专题	2018专题
推荐引用方式 GB/T 7714	Yu, Zhijian,Guo, Dongming,Guo, Liangchao,et al. A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry[J]. APPLIED SURFACE SCIENCE,2018,427:409-415.
APA	Yu, Zhijian,Guo, Dongming,Guo, Liangchao,Du, Yuefeng,Shi, Zhifeng,&Zhang, Zhenyu.(2018).A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry.APPLIED SURFACE SCIENCE,427,409-415.
MLA	Yu, Zhijian,et al."A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry".APPLIED SURFACE SCIENCE 427(2018):409-415.