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Gettering of Cu by microcavities in bonded/ion-cut silicon-on-insulator and separation by implantation of oxygen 期刊论文
JOURNAL OF APPLIED PHYSICS, 1999, 卷号: 86, 期号: 8, 页码: 4214-4219
Zhang, MO; Zeng, XC; Chu, PK; Scholz, R; Lin, CL
收藏  |  浏览/下载:6/0  |  提交时间:2012/03/25
Short-wavelength photoluminescence from silicon and nitrogen coimplanted SiO2 films 期刊论文
APPLIED PHYSICS LETTERS, 1999, 卷号: 74, 期号: 10, 页码: 1403-1405
Zhao, J; Mao, DS; Lin, ZX; Ding, XZ; Jiang, BY; Yu, YH; Liu, XH; Yang, GQ
收藏  |  浏览/下载:23/0  |  提交时间:2012/03/25
Comparison of Cu gettering to H+ and He+ implantation-induced cavities in separation-by-implantation-of-oxygen wafers 期刊论文
JOURNAL OF APPLIED PHYSICS, 1999, 卷号: 85, 期号: 1, 页码: 94-98
Zhang, MA; Lin, CL; Duo, XZ; Lin, ZX; Zhou, ZY
收藏  |  浏览/下载:17/0  |  提交时间:2012/03/25


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