CORC

在结果中检索

CORC

浏览/检索结果: 共24条，第1-10条 帮助

限定条件                
已选(0)清除 条数/页：   排序方式：
Double-beam laser interference lithography based on optical field modulation 会议论文
Chengdu, China, June 26, 2018 - June 29, 2018
作者:  Peng, Fuping;  Yan, Wei;  Yang, Fan;  Li, Fanxing
收藏  |  浏览/下载：7/0  |  提交时间：2021/05/06
Deep subwavelength interference lithography with tunable pattern period based on bulk plasmon polaritons 期刊论文
Optics Express, 2017, 卷号: 25, 期号: 17, 页码: 20511-20521
作者:  Liu, Hongchao;  Kong, Weijie;  Liu, Kaipeng;  Zhao, Chengwei;  Du, Wenjuan
收藏  |  浏览/下载：27/0  |  提交时间：2018/11/20
Design and simulation of large field plate lithography lens 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850V
作者:  Deng, Chao;  Xing, Tingwen;  Lin, Wumei;  Zhu, Xianchang
收藏  |  浏览/下载：19/0  |  提交时间：2018/06/14
A new flexible hybrid mask for contact exposure and its fabrication 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850Q
作者:  Liu, Xin;  Zhang, Man;  Cao, A-Xiu;  Pang, Hui;  Wang, Jia-Zhou
收藏  |  浏览/下载：19/0  |  提交时间：2018/06/14
Positioning control system of three-dimensional wafer stage of lithography 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850T
作者:  Tian, Peng;  Yan, Wei;  Yang, Fan;  Li, Fanxing;  Hu, Song
收藏  |  浏览/下载：21/0  |  提交时间：2018/06/14
High precision locating control system based on VCM for Talbot lithography 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850L
作者:  Yao, Jingwei;  Zhao, Lixin;  Deng, Qian;  Hu, Song
收藏  |  浏览/下载：34/0  |  提交时间：2018/06/14
UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850M
作者:  Deng, Qian;  Liu, Junbo;  Zhou, Shaolin;  Tang, Yan;  Zhao, Lixin
收藏  |  浏览/下载：34/0  |  提交时间：2018/06/14
Research development of thermal aberration in 193nm lithography exposure system 会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
作者:  Wang, Yueqiang;  Liu, Yong
收藏  |  浏览/下载：19/0  |  提交时间：2016/11/23
Design of a projection objective with high numeric aperture and large view field 会议论文
Proceedings of SPIE: 7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS, 2014
作者:  Liu, Junbo;  Hu, Song;  Gao, Hongtao;  Zhao, Lixin;  Zhu, Xianchang
收藏  |  浏览/下载：15/0  |  提交时间：2016/11/24
Intelligent control system based on ARM for lithography tool 会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
作者:  Chen, Changlong;  Tang, Xiaoping;  Hu, Song;  Wang, Nan
收藏  |  浏览/下载：12/0  |  提交时间：2016/11/24

©版权所有 ©2017 CSpace - Powered by CSpace