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会议论文 [34]
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Double-beam laser interference lithography based on optical field modulation
会议论文
Chengdu, China, June 26, 2018 - June 29, 2018
作者:
Peng, Fuping
;
Yan, Wei
;
Yang, Fan
;
Li, Fanxing
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2021/05/06
interference
optical field
modulation function
Development of a Roll-to-roll Ultraviolet Imprint Lithography Equipment for Superhydrophobic Film Fabrication
会议论文
Singapore, 2017
作者:
Z.Peng
;
T. Wu
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2018/02/02
Efficient Cell Electrofusion Chip Based on Micromanipulation
会议论文
6th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (IEEE 3M-NANO), 2016-07-18
作者:
Zhu, Junhui[1]
;
Wang, Yong[2]
;
Chen, Ruihua[3]
;
Shu, Chengsong[4]
;
Ru, Changhai[5]
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2019/04/26
micromanipulation
cell electrofusion chip
pairing method
lithography
micropore electrode
Super resolution nano-information recording in a new hydrazone metal complex material
会议论文
作者:
Zhang, Kui
;
Wei, Jingsong
;
Chen, Zhimin
;
Wei, Tao
;
Geng, Yongyou
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2017/12/25
Fabrication of polymer-based multimode interference optical splitters by UV-based soft imprint lithography
会议论文
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT) - Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, Suzhou, PEOPLES R CHINA, 2016-04-26
作者:
Liang, Yuxin
;
Han, Xiuyou
;
Luo, Yuqing
;
Gu, Yiying
;
Wu, Zhenlin
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2019/12/09
Polymer-based optical splitter
multimode interference
UV-based soft imprint lithography
The effect of radial polarization in multiphoton lithography
会议论文
Beijing, China, May 5, 2015 - May 7, 2015
作者:
Lin, Le
;
Zheng, Mei-Ling
;
Dong, Xian-Zi
;
Duan, Xuan-Ming
;
Zhao, Zhen-Sheng
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  |  
浏览/下载:10/0
  |  
提交时间:2018/03/16
A novel method for fabricating curved frequency selective surface via 3D printing technology
会议论文
International Symposium on Optoelectronic Technology and Application 2014: Laser Materials Processing; and Micro/Nano Technologies, IPTA 2014, May 13, 2014 - May 15, 2014, Beijing, China
Fengchao L.
;
Jinsong G.
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  |  
浏览/下载:28/0
  |  
提交时间:2015/04/27
Research development of thermal aberration in 193nm lithography exposure system
会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
作者:
Wang, Yueqiang
;
Liu, Yong
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  |  
浏览/下载:19/0
  |  
提交时间:2016/11/23
Design of a projection objective with high numeric aperture and large view field
会议论文
Proceedings of SPIE: 7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS, 2014
作者:
Liu, Junbo
;
Hu, Song
;
Gao, Hongtao
;
Zhao, Lixin
;
Zhu, Xianchang
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2016/11/24
Intelligent control system based on ARM for lithography tool
会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
作者:
Chen, Changlong
;
Tang, Xiaoping
;
Hu, Song
;
Wang, Nan
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  |  
浏览/下载:12/0
  |  
提交时间:2016/11/24
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