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A study of ultraprecision mechanical polishing of single-crystal silicon with laser nano-structured diamond abrasive by molecular dynamics simulation 期刊论文
International Journal of Mechanical Sciences, 2019
作者:  Houfu Dai;  Fa Zhang;  Jianbin Chen
收藏  |  浏览/下载:8/0  |  提交时间:2019/12/13
A study of ultraprecision mechanical polishing of single-crystal silicon with laser nano-structured diamond abrasive by molecular dynamics simulation 期刊论文
International Journal of Mechanical Sciences, 2019, 卷号: Vol.157-158, 页码: 254-266
作者:  Dai, Houfu;  Zhang, Fa;  Chen, Jianbin
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/13
A study of ultraprecision mechanical polishing of single-crystal silicon with laser nano-structured diamond abrasive by molecular dynamics simulation 期刊论文
International Journal of Mechanical Sciences, 2019, 卷号: Vol.157-158, 页码: 254-266
作者:  Houfu Dai;  Fa Zhang;  Jianbin Chen
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/13
A study of ultraprecision mechanical polishing of single-crystal silicon with laser nano-structured diamond abrasive by molecular dynamics simulation 期刊论文
INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES, 2019, 卷号: Vol.157, 页码: 254-266
作者:  Dai, HF;  Zhang, F;  Chen, JB
收藏  |  浏览/下载:5/0  |  提交时间:2019/12/17


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