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浏览/检索结果: 共5条，第1-5条 帮助 限定条件 学科主题：微电子学     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Ultra-compact low-voltage and slow-light MZI electro-optic modulator based on monolithically integrated photonic crystal 期刊论文 optics communications, 2014, 卷号: 315, 页码: 138-146 Zhang, YH; Tian, HP; Yang, DQ; Liu, HZ; Liu, YY; Ji, YF 收藏  |  浏览/下载：17/0  |  提交时间：2015/04/02 Ultra-broadband and ultra-low-loss photonic crystal with band-flatness waveguide 60 degrees bend obtained based on lattice-shifted optimization 期刊论文 optics communications, 2014, 卷号: 322, 页码: 227-233 Zhou, J; Tian, HP; Yang, DQ; Liu, YY; Liu, Q; Ji, YF 收藏  |  浏览/下载：15/0  |  提交时间：2015/04/02 A SIMPLE METHOD FOR EFFECTIVELY RESTRAIN ELECTROCHEMICAL CORROSION OF POLYCRYSTALLINE SILICON BY HF-BASED SOLUTIONS 会议论文 24th ieee international conference on micro electro mechanical systems (mems), cancun, mexico, 2011 Xie J (Xie J.); Liu YF (Liu Y. F.); Zhang ML (Zhang M. L.); Yang JL (Yang J. L.); Yang FH (Yang F. H.) 收藏  |  浏览/下载：11/0  |  提交时间：2011/12/13 An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions 期刊论文 journal of microelectromechanical systems, 2011, 卷号: 20, 期号: 2, 页码: 470-475 Liu YF; Xie J; Zhang ML; Yang JL; Yang FH 收藏  |  浏览/下载：52/1  |  提交时间：2011/07/06 Galvanic corrosion  polysilicon  resistivity  titanium (Ti) redox sacrificial layer  POLYSILICON  OXIDATION   In-situ Boron-doped Low-stress LPCVD Polysilicon for Micromechanical Disk Resonator 会议论文 9th international conference on solid-state and integrated-circuit technology, beijing, peoples r china, oct 20-23, 2008 Liu, YF; Xie, J; Yang, JL; Tang, LJ; Yang, FH 收藏  |  浏览/下载：31/0  |  提交时间：2010/03/09 FILMS