A SIMPLE METHOD FOR EFFECTIVELY RESTRAIN ELECTROCHEMICAL CORROSION OF POLYCRYSTALLINE SILICON BY HF-BASED SOLUTIONS

	A SIMPLE METHOD FOR EFFECTIVELY RESTRAIN ELECTROCHEMICAL CORROSION OF POLYCRYSTALLINE SILICON BY HF-BASED SOLUTIONS
	Xie J (Xie J.) ; Liu YF (Liu Y. F.) ; Zhang ML (Zhang M. L.) ; Yang JL (Yang J. L.) ; Yang FH (Yang F. H.)
	2011
会议名称	24th ieee international conference on micro electro mechanical systems (mems)
会议日期	2011
会议地点	cancun, mexico
收录类别	CPCI（ISTP）
会议录	proceedings: ieee micro electro mechanical systems 页: 205-208
学科主题	微电子学
语种	英语
内容类型	会议论文
源URL	[http://ir.semi.ac.cn/handle/172111/22640]
专题	半导体研究所_半导体集成技术工程研究中心
推荐引用方式 GB/T 7714	Xie J ,Liu YF ,Zhang ML ,et al. A SIMPLE METHOD FOR EFFECTIVELY RESTRAIN ELECTROCHEMICAL CORROSION OF POLYCRYSTALLINE SILICON BY HF-BASED SOLUTIONS[C]. 见:24th ieee international conference on micro electro mechanical systems (mems). cancun, mexico. 2011.