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上海微系统与信息技... [11]
北京大学 [3]
上海技术物理研究所 [1]
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期刊论文 [13]
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Structural and electrical characteristics of oxygen-implanted 6H-SiC
期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 卷号: 169, 页码: 1-5
Wang, LW
;
Huang, JP
;
Duo, XZ
;
Song, ZT
;
Lin, CL
;
Zetterling, CM
;
Ostling, M
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2012/03/24
ENHANCED THERMAL-OXIDATION
SILICON-CARBIDE
ION-IMPLANTATION
AMORPHIZATION
LAYERS
Investigation of damage behaviour and isolation effect of n-type 6H-SiC by implantation of oxygen
期刊论文
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2000, 卷号: 33, 期号: 12, 页码: 1551-1555
Wang, LW
;
Huang, JP
;
Duo, XZ
;
Song, ZT
;
Lin, CL
;
Zetterling, CM
;
Ostling, M
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2012/03/24
ENHANCED THERMAL-OXIDATION
ION-IMPLANTATION
SILICON-CARBIDE
AMORPHIZATION
LAYERS
The effect of hydrogen passivation on electrical characteristics of double-polysilicon self-aligned bipolar transistors
期刊论文
固体电子学, 1999
Sanden, M
;
Karlin, TE
;
Ma, P
;
Grahn, JV
;
Zhang, SL
;
Ostling, M
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/11/11
DOPED POLYSILICON
EMITTER
TECHNOLOGY
BASE
VLSI
The effect of emitter overetch and base implantation tilt on the performance of double polysilicon bipolar transistors
其他
1999-01-01
Linder, M
;
Malm, BG
;
Ma, P
;
Grahn, JV
;
Zhang, SL
;
Ostling, M
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2015/11/11
TECHNOLOGY
The influence on electrical performance of double-polysilicon bipolar transistors by forming gas annealing
其他
1999-01-01
Sanden, M
;
Karlin, TE
;
Ma, P
;
Grahn, JV
;
Zhang, SL
;
Ostling, M
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/11/11
Effect of annealing on SiC thin films prepared by pulsed laser deposition
期刊论文
DIAMOND AND RELATED MATERIALS, 1999, 卷号: 8, 期号: 12, 页码: 2099-2102
Huang, JP
;
Wang, LW
;
Wen, J
;
Wang, YX
;
Lin, CL
;
Ostling, M
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2012/03/25
CHEMICAL-VAPOR-DEPOSITION
CUBIC SILICON-CARBIDE
EPITAXIAL-GROWTH
TEMPERATURE
ABLATION
DEVICES
Growth of SiC thin films on (100) and (111) silicon by pulsed laser deposition combined with a vacuum annealing process
期刊论文
WIDE-BANDGAP SEMICONDUCTORS FOR HIGH-POWER, HIGH-FREQUENCY AND HIGH-TEMPERATURE APPLICATIONS-1999, 1999, 卷号: 572, 页码: 207-212
Huang, JP
;
Wang, LW
;
Wen, U
;
Wang, YX
;
Lin, CL
;
Zetterling, CM
;
Ostling, M
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2012/03/25
CHEMICAL-VAPOR-DEPOSITION
CARBIDE
TEMPERATURE
DEVICES
Preparation of AlN thin films by nitridation of Al-coated Si substrate
期刊论文
THIN SOLID FILMS, 1999, 卷号: 340, 期号: 1-2, 页码: 137-139
Huang, JP
;
Wang, LW
;
Shen, QW
;
Lin, CL
;
Ostling, M
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2012/03/25
CHEMICAL-VAPOR-DEPOSITION
PULSED-LASER DEPOSITION
GROWTH
A study of optical characteristics of damage in oxygen-implanted 6H-SiC
期刊论文
JOURNAL OF MATERIALS SCIENCE LETTERS, 1999, 卷号: 18, 期号: 12, 页码: 979-982
Wang,LW
;
Huang,JP
;
Lin,CL
;
Zou,SC
;
Zheng,YX
;
Wang,XJ
;
Huang,DM
;
Zetterling,CM
;
Ostling,M
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2012/03/25
ENHANCED THERMAL-OXIDATION
SILICON-CARBIDE
ION-IMPLANTATION
THIN-FILMS
AMORPHIZATION
LAYERS
Structural and electrical characterization of AlN thin films obtained by nitridation of Al/Si substrate
期刊论文
JOURNAL OF ELECTRONIC MATERIALS, 1999, 卷号: 28, 期号: 3, 页码: 225-227
Huang, JP
;
Wang, LW
;
Shen, QW
;
Lin, CL
;
Ostling, M
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2012/03/25
PULSED-LASER DEPOSITION
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