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大连理工大学 [4]
清华大学 [2]
北京大学 [2]
西安交通大学 [2]
半导体研究所 [2]
光电技术研究所 [1]
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期刊论文 [12]
会议论文 [3]
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Cost-effective mid-infrared micropolarizer fabricated on common silicon by soft nanoimprint lithography
期刊论文
APPLIED OPTICS, 2019, 卷号: 58, 页码: 4139-4142
作者:
Zeng, Xiangwei
;
Chu, Jinkui
;
Kang, Weidong
;
Wu, Qinming
;
Zhan, Ran
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2019/12/02
Cost effectiveness
Fabrication
Silica
Silicon
Silicon oxides
Substrates
Thermal evaporation, Cost effective
Extinction ratios
Midinfrared
Nanoimprint process
Si substrates
Silicon substrates
Transverse magnetic, Nanoimprint lithography
A new low-cost fabrication method of SU-8 micro-nano channels and needle tip in electro-hydrodynamic jet chips
期刊论文
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2018, 卷号: 28
作者:
Sun, Lei
;
Liu, Lingpeng
;
Qi, Liping
;
Zhou, Jiangang
;
Yin, Zhifu
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/02
electro-hydrodynamic jet
micro-nano channel
thermal nanoimprint
ultraviolet lithography
Fabrication of bottom fillet nano-mold to increase the mold lifetime
期刊论文
Journal of Nanoscience and Nanotechnology, 2017, 卷号: 17, 期号: 12, 页码: 8975-8980
作者:
Lu BL(鲁伯林)
;
Cheng, E.
;
Sun, Lei
;
Zou, Helin
;
Yin, Zhifu
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2017/11/15
Numerical Simulation
PDMS Nano-Mold
PECVD
SiNx
A low-cost method of fabricating hybrid micro-nano fluidic chip by double-layer PDMS mold and UV-thermal nanoimprinting
期刊论文
MICROFLUIDICS AND NANOFLUIDICS, 2016, 卷号: 20, 页码: -
作者:
Sun, Lei
;
Yin, Zhifu
;
Qi, Liping
;
Wu, Dongjiang
;
Zou, Helin
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/09
Hybrid micro-nano channel
PDMS
Surface modification
UV-thermal nanoimprint
A study of thermoplastic properties of a novel photoresist
其他
2015-01-01
Lou, Kevin
;
Sheu, Gene
;
Yang, Shao-Ming
;
Laksana, Pradhana Jati Budhi
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  |  
浏览/下载:5/0
  |  
提交时间:2017/12/03
Flexible Organic Light-Emitting Diodes with Enhanced Light Out-Coupling Efficiency Fabricated on a Double-Sided Nanotextured Substrate
期刊论文
ACS APPLIED MATERIALS & INTERFACES, 2014, 卷号: 6, 期号: [db:dc_citation_issue], 页码: 10213-10219
作者:
Luo, Yu
;
Wang, Chunhui
;
Wang, Li
;
Ding, Yucheng
;
Li, Long
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/03
colloidal lithography
flexible organic light-emitting diode
thermal nanoimprint
nanotextured substrate
light extraction
Flexible Organic Light-Emitting Diodes with Enhanced Light Out-Coupling Efficiency Fabricated on a Double-Sided Nanotextured Substrate
期刊论文
ACS APPLIED MATERIALS & INTERFACES, 2014, 卷号: 6, 页码: 10213-10219
作者:
Luo, Yu[1]
;
Wang, Chunhui[2]
;
Wang, Li[3]
;
Ding, Yucheng[4]
;
Li, Long[5]
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  |  
浏览/下载:3/0
  |  
提交时间:2019/04/30
flexible organic light-emitting diode
nanotextured substrate
colloidal lithography
thermal nanoimprint
light extraction
Highly Reproducible Nanolithography by Dynamic Plough of an Atomic-Force Microscope Tip and Thermal-Annealing Treatment
期刊论文
ieee transactions on nanotechnology, 2011, 卷号: 10, 期号: 1, 页码: 53-58
Lu XF
;
Balocco C
;
Yang FH
;
Song AM
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  |  
浏览/下载:71/7
  |  
提交时间:2011/07/05
Atomic-force microscope (AFM)
nanolithography
self-switching diodes (SSDs)
2-D electron gas
CONDUCTING POLYMER-FILMS
NANOMETER-SCALE
LITHOGRAPHY
FABRICATION
SURFACES
DEVICES
NANOSTRUCTURES
Realization of silicon nitride template for nanoimprint: A first result
会议论文
Nanoscience and Technology, Pts 1 and 2, China International Conference on Nanoscience and Technology (ChinaNANO 2005), Beijing, PEOPLES R CHINA, Web of Science
Liu Zewen
;
Zhang Tian-ruo
;
Liu Litian
;
Li Zhijian
收藏
  |  
浏览/下载:2/0
Realization of silicon nitride template for nanoimprint: a first result
期刊论文
2010, 2010
Liu Zewen
;
Zhang Tian-ruo
;
Liu Litian
;
Li Zhijian
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  |  
浏览/下载:3/0
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