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	A new low-cost fabrication method of SU-8 micro-nano channels and needle tip in electro-hydrodynamic jet chips
	Sun, Lei; Liu, Lingpeng; Qi, Liping; Zhou, Jiangang; Yin, Zhifu; Wu, Dongjiang; Zou, Helin
刊名	JOURNAL OF MICROMECHANICS AND MICROENGINEERING
	2018
卷号	28
关键词	electro-hydrodynamic jet micro-nano channel thermal nanoimprint ultraviolet lithography
ISSN号	0960-1317
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3258803
专题	大连理工大学
作者单位	1.Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian, Peoples R China. 2.Dalian Univ Technol, Dept Biomed Engn, Dalian, Peoples R China. 3.Dalian Univ Dalian, Sch Phys Sci & Technol, Dalian, Peoples R China. 4.Jilin Univ, Sch Mech Sci & Engn, Changchun, Jilin, Peoples R China. 5.Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian, Peoples R China. 6.Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian, Peoples R China. 7.Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian, Peoples R China.
推荐引用方式 GB/T 7714	Sun, Lei,Liu, Lingpeng,Qi, Liping,et al. A new low-cost fabrication method of SU-8 micro-nano channels and needle tip in electro-hydrodynamic jet chips[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2018,28.
APA	Sun, Lei.,Liu, Lingpeng.,Qi, Liping.,Zhou, Jiangang.,Yin, Zhifu.,...&Zou, Helin.(2018).A new low-cost fabrication method of SU-8 micro-nano channels and needle tip in electro-hydrodynamic jet chips.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,28.
MLA	Sun, Lei,et al."A new low-cost fabrication method of SU-8 micro-nano channels and needle tip in electro-hydrodynamic jet chips".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 28(2018).

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