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浏览/检索结果: 共3条，第1-3条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Radial density uniformity of dual frequency capacitively coupled plasma 期刊论文 ACTA PHYSICA SINICA, 2012, 卷号: 61, 页码: - 作者:  Jiang Xiang-Zhan;  Liu Yong-Xin;  Bi Zhen-Hua;  Lu Wen-Qi;  Wang You-Nian 收藏  |  浏览/下载：1/0  |  提交时间：2019/12/13 dual frequency capacitively coupled plasma  radial uniformity  complete floating double probe  improved 2D fluid simulations   Influence of dual-frequency source powers on ion density and electron temperature in capacitively-coupled argon plasma 期刊论文 18th International Vacuum Congress (IVC)/International Conference on Nanoscience and Technology (ICNT)/14th International Conference on Surfaces Science (ICSS)/Vacuum and Surface Sciences Conference of Asia and Australia (VASSCAA), 2012, 卷号: 86, 页码: 881-884 作者:  Jiang, Xiang-Zhan;  Liu, Yong-Xin;  Lu, Wen-Qi;  Bi, Zhen-Hua;  Gao, Fei 收藏  |  浏览/下载：3/0  |  提交时间：2019/12/18 Dual-frequency  Capacitively coupled plasma  Complete floating double probe   Spatially resolved measurements of ion density and electron temperature in a dual-frequency capacitively coupled plasma by complete floating double probe technique 期刊论文 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2011, 卷号: 29 作者:  Jiang, Xiang-Zhan;  Liu, Yong-Xin;  Yang, Shuo;  Lu, Wen-Qi;  Bi, Zhen-Hua 收藏  |  浏览/下载：2/0  |  提交时间：2019/12/18