| Radial density uniformity of dual frequency capacitively coupled plasma | |
| Jiang Xiang-Zhan; Liu Yong-Xin; Bi Zhen-Hua; Lu Wen-Qi; Wang You-Nian | |
| 刊名 | ACTA PHYSICA SINICA
 |
| 2012 | |
| 卷号 | 61页码:- |
| 关键词 | dual frequency capacitively coupled plasma radial uniformity complete floating double probe improved 2D fluid simulations |
| ISSN号 | 1000-3290 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4666286 |
| 专题 | 大连理工大学 |
| 作者单位 | 1.Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China. 2.Xinjiang Ploytech Coll, Urumqi 830091, Peoples R China. 3.Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Jiang Xiang-Zhan,Liu Yong-Xin,Bi Zhen-Hua,et al. Radial density uniformity of dual frequency capacitively coupled plasma[J]. ACTA PHYSICA SINICA,2012,61:-. |
| APA | Jiang Xiang-Zhan,Liu Yong-Xin,Bi Zhen-Hua,Lu Wen-Qi,&Wang You-Nian.(2012).Radial density uniformity of dual frequency capacitively coupled plasma.ACTA PHYSICA SINICA,61,-. |
| MLA | Jiang Xiang-Zhan,et al."Radial density uniformity of dual frequency capacitively coupled plasma".ACTA PHYSICA SINICA 61(2012):-. |
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