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	Spatially resolved measurements of ion density and electron temperature in a dual-frequency capacitively coupled plasma by complete floating double probe technique
	Jiang, Xiang-Zhan; Liu, Yong-Xin; Yang, Shuo; Lu, Wen-Qi; Bi, Zhen-Hua; Li, Xiao-Song; Wang, You-Nian
刊名	JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
	2011
卷号	29
ISSN号	0734-2101
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4837968
专题	大连理工大学
作者单位	Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Jiang, Xiang-Zhan,Liu, Yong-Xin,Yang, Shuo,et al. Spatially resolved measurements of ion density and electron temperature in a dual-frequency capacitively coupled plasma by complete floating double probe technique[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2011,29.
APA	Jiang, Xiang-Zhan.,Liu, Yong-Xin.,Yang, Shuo.,Lu, Wen-Qi.,Bi, Zhen-Hua.,...&Wang, You-Nian.(2011).Spatially resolved measurements of ion density and electron temperature in a dual-frequency capacitively coupled plasma by complete floating double probe technique.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,29.
MLA	Jiang, Xiang-Zhan,et al."Spatially resolved measurements of ion density and electron temperature in a dual-frequency capacitively coupled plasma by complete floating double probe technique".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 29(2011).

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