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The application of a helicon plasma source in reactive sputter deposition of tungsten nitride thin films
期刊论文
Plasma Science and Technology, 2022, 卷号: 24
作者:
YANG,Yan
;
JI,Peiyu
;
LI,Maoyang
;
YU,Yaowei
;
HUANG,Jianjun
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  |  
浏览/下载:10/0
  |  
提交时间:2022/12/22
helicon wave plasma
reactive sputtering
tungsten nitride
plasma diagnosis
Research on the properties of Ta2O5optical films prepared with APS plasma assisted deposition
会议论文
Shanghai, China, 2021-10-28
作者:
Pan, Yong-Gang
;
Liu, Zheng
;
Liu, Wen-Cheng
;
Li, Mian
;
Zhang, Si-Bao
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  |  
浏览/下载:64/0
  |  
提交时间:2022/03/18
Thin films
APS plasma assisted deposition
stress
refractive index
Research on the properties of HfO2optical films prepared with APS assisted electron beam evaporation deposition
会议论文
Hangzhou, China, 2021-05-23
作者:
Pan, Yong-Gang
;
Liu, Zheng
;
Li, Mian
;
Liu, Wen-Cheng
;
Bai, Long
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  |  
浏览/下载:46/0
  |  
提交时间:2021/09/14
thin film
APS assisted deposition
Laser damage threshold
Orthogonal experiment
Highly (100)-orientated SnSe thin films deposited by pulsed-laser deposition
期刊论文
APPLIED SURFACE SCIENCE, 2021, 卷号: 535, 页码: 8
作者:
Gong, Xiangnan
;
Feng, Menglei
;
Wu, Hong
;
Zhou, Hongpeng
;
Suen, Chunhung
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  |  
浏览/下载:49/0
  |  
提交时间:2020/12/08
SnSe
Thin films
Pulsed laser deposition
Thermal annealing
Angle-resolved polarized Raman spectra
Influence of dry etching on the properties of SiO2 and HfO2 single layers
期刊论文
APPLIED OPTICS, 2020, 卷号: 59, 期号: 5, 页码: A128-A134
作者:
Xie, LY
;
Liu, HS
;
Zhao, J
;
Jiao, HF
;
Zhang, JL
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  |  
浏览/下载:4/0
  |  
提交时间:2021/09/06
THIN-FILMS
Formation of hierarchical porosity in oxidation of Ag films by reactive sputtering deposition of metal oxides via the Kirkendall effect
期刊论文
NANOSCALE, 2019, 卷号: 11, 页码: 10034-10044
作者:
Xu, W.
;
Li, C. X.
;
Zhang, Q. Y.
;
Ma, C. Y.
;
Wang, Q.
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  |  
浏览/下载:18/0
  |  
提交时间:2019/12/02
Diffusion
Metals
Nanorods
Oil field equipment
Oxidation
Oxides
Porosity
Porous materials
Reactive sputtering
Silver oxides
Solid-State Batteries
Solid-state sensors
Thin films, Deposition Parameters
Hierarchical porosity
Hierarchically porous
Kirkendall effects
Oxidation environment
Oxide nanorod arrays
Solid state thin films
Sputtering deposition, Oxide films
Pulsed laser deposition and characteristics of epitaxial non-polar m-plane ZnO1-xSx alloy films
期刊论文
JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 卷号: Vol.773, 页码: 443-448
作者:
Chen, Jian
;
Ding, Yali
;
Li, Lei
;
Zhang, Wuzhong
;
Li, Mingkai
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/12/13
ZnOS
alloy
thin
films
Non-polar
m-plane
Pulsed
laser
deposition
Epitaxial
growth
Lattice
parameters
Bandgap
engineering
Effects of input power, gas flow rate and hydrogen concentration on Cu film deposition by a radio frequency driven non-thermal atmospheric pressure plasma jet
期刊论文
THIN SOLID FILMS, 2018, 卷号: 660, 页码: 493-498
作者:
Guo, Q. J.
;
Ni, G. H.
;
Li, L.
;
Lin, Q. F.
;
Zhao, Y. J.
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  |  
浏览/下载:0/0
  |  
提交时间:2019/11/11
Cu thin films
Plasma deposition
Atmospheric pressure plasma jet
Input power
Gas flow rate
Hydrogen concentration
One-Dimensional Zinc Oxide Nanomaterials for Application in High-Performance Advanced Optoelectronic Devices
期刊论文
CRYSTALS, 2018, 卷号: 8, 期号: 5, 页码: -
作者:
Ding, M
;
Guo, Z
;
Zhou, LQ
;
Fang, X
;
Zhang, LL
收藏
  |  
浏览/下载:34/0
  |  
提交时间:2018/09/06
Zno Nanowire Arrays
Light-emitting Diode
Nanorods/meh-ppv Heterostructure
Flame Transport Approach
Electrochemical Deposition
Field-emission
Ultraviolet Electroluminescence
Ag Nanoparticles
Enhanced Photoresponse
Hydrothermal Growth
Flexible Electrochromic V2O5 Thin Films with Ultrahigh Coloration Efficiency on Graphene Electrodes
期刊论文
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2018, 卷号: 165, 期号: 5, 页码: D183-D189
作者:
Liang, Lingyan
;
Wu, Jiao
;
Qiu, Dong
;
Zhang, Hongliang
;
Cao, Hongtao
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  |  
浏览/下载:36/0
  |  
提交时间:2018/12/04
Vanadium-oxide Films
Sol-gel
Ion Batteries
Performance
Thickness
Devices
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