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The Design and Analysis of Piezoresistive Shuriken-Structured Diaphragm Micro-Pressure Sensors 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2017
Guan, Taotao; Yang, Fang; Wang, Wei; Huang, Xian; Jiang, Boyan; Zhang, Dacheng
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03
A novel 0-3 kPa piezoresistive pressure sensor based on a shuriken-structured diaphragm 其他
2016-01-01
Guan, Taotao; Yang, Fang; Wang, Wei; Huang, Xian; Jiang, Boyan; He, Jun; Zhang, Li; Fu, Fengshan; Li, Dan; Li, Rui; Zhao, Qiancheng; Zhang, Dacheng
收藏  |  浏览/下载：8/0  |  提交时间：2017/12/03
A NOVEL 0-3 KPA PIEZORESISTIVE PRESSURE SENSOR BASED ON A SHURIKEN-STRUCTURED DIAPRAGM 其他
2016-01-01
Guan, Taotao; Yang, Fang; Wang, Wei; Huang, Xian; Jiang, Boyan; He, Jun; Zhang, Li; Fu, Fengshan; Li, Dan; Li, Rui; Zhao, Qiancheng; Wang, Wei; Zhang, Dacheng
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Parylene C autofluorescence for on-chip highest processing temperature sensing 其他
2015-01-01
Zhang, Lingqian; Liu, Yaoping; Yang, Fang; Wang, Wei; Zhang, Dacheng; Li, Zhihong
收藏  |  浏览/下载：2/0  |  提交时间：2017/12/03
3D MORPHOLOGY RECONSTRUCTION OF HIGH ASPECT RATIO MEMS STRUCTURE BY USING AUTOFLUORESCENCE OF PARYLENE C 其他
2015-01-01
Zhang, Lingqian; Liu, Yaoping; Yang, Fang; Wang, Wei; Zhang, Dacheng; Li, Zhihong
收藏  |  浏览/下载：2/0  |  提交时间：2017/12/03
Hard mask free DRIE of crystalline Si nanobarrel with 6.7nm wall thickness and 50/1 aspect ratio 其他
2015-01-01
Liu, Peng; Yang, Fang; Wang, Wei; Luo, Kui; Wang, Ying; Zhang, Dacheng
收藏  |  浏览/下载：4/0  |  提交时间：2017/12/03
Discussion and analysis of Au/a-Si contact resistance in MEMS/NEMS devices 其他
2015-01-01
Fu, Fengshan; Yang, Fang; Wang, Wei; Huang, Xian; He, Jun; Zhang, Li; Guan, Taotao; Li, Rui; Zhang, Dacheng
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03
Investigation of stress rupture properties of micro beams using the piezoresistive effect 其他
2015-01-01
Guan, Taotao; Yang, Fang; Wang, Wei; Huang, Xian; He, Jun; Zhang, Li; Fu, Fengshan; Li, Rui; Zhang, Dacheng
收藏  |  浏览/下载：4/0  |  提交时间：2017/12/03
Parylene C Autofluorescence for On-chip Highest Processing Temperature Sensing 其他
2015-01-01
Zhang, Lingqian; Liu, Yaoping; Yang, Fang; Wang, Wei; Zhang, Dacheng; Li, Zhihong
收藏  |  浏览/下载：4/0  |  提交时间：2017/12/03
AES analysis of interdiffusions in Cr/Au, Ti/Au and TiW/Au multi-layer films 其他
2015-01-01
He, Jun; Yang, Fang; Wang, Wei; Zhang, Li; Li, Rui; Zhang, Dacheng
收藏  |  浏览/下载：8/0  |  提交时间：2017/12/03

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