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	A NOVEL 0-3 KPA PIEZORESISTIVE PRESSURE SENSOR BASED ON A SHURIKEN-STRUCTURED DIAPRAGM
	Guan, Taotao ; Yang, Fang ; Wang, Wei ; Huang, Xian ; Jiang, Boyan ; He, Jun ; Zhang, Li ; Fu, Fengshan ; Li, Dan ; Li, Rui ; Zhao, Qiancheng ; Wang, Wei ; Zhang, Dacheng
	2016
关键词	SENSITIVITY LINEARITY
英文摘要	This paper reported a novel high sensitivity and linearity 0-3 kPa piezoresistive pressure sensor by carefully trading off the stress on the beam edge and the deflection of the sensing diaphragm. A shuriken-structured diaphragm (SSD) was proposed for the first time to improve both sensitivity and linearity for the piezoresistive pressure sensor. The fabricated sensor showed a sensitivity of 4.72 mV/kPa/V and a nonlinearity of 0.18% FSO (full scale output) in the pressure range of 0-3 kPa. Compared with our previous work, the sensitivity was increased by 28.3%, while the nonlinearity was reduced by 50%.; CPCI-S(ISTP); dchzhang@ime.pku.edu.cn; 816-819
语种	英语
出处	29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/457042]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Guan, Taotao,Yang, Fang,Wang, Wei,et al. A NOVEL 0-3 KPA PIEZORESISTIVE PRESSURE SENSOR BASED ON A SHURIKEN-STRUCTURED DIAPRAGM. 2016-01-01.

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