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	3D MORPHOLOGY RECONSTRUCTION OF HIGH ASPECT RATIO MEMS STRUCTURE BY USING AUTOFLUORESCENCE OF PARYLENE C
	Zhang, Lingqian ; Liu, Yaoping ; Yang, Fang ; Wang, Wei ; Zhang, Dacheng ; Li, Zhihong
	2015
英文摘要	This paper reported a MEMS fabrication compatible, damage free method for in-process 3D morphology reconstruction of high aspect ratio microstructure. As a novel morphology tracer, Parylene C thin film was conformally deposited onto the structure and annealed at high temperature under N-2. The autofluorescence of Parylene C was considerably enhanced by the annealing, which made it possible to image the microstructure. By scanning with a confocal microscopy, 3D morphology of the microstructure was reconstructed. The preliminary result indicated that microstructure with width of 8 mu m and depth of 34 mu m (34.1 mu m actual depth by SEM) was successfully and accurately measured by this method.; EI; CPCI-S(ISTP); w.wang@pku.edu.cn; February; 358-360; 2015-February
语种	英语
出处	2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015)
DOI标识	10.1109/MEMSYS.2015.7050963
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/423603]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhang, Lingqian,Liu, Yaoping,Yang, Fang,et al. 3D MORPHOLOGY RECONSTRUCTION OF HIGH ASPECT RATIO MEMS STRUCTURE BY USING AUTOFLUORESCENCE OF PARYLENE C. 2015-01-01.

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