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浏览/检索结果: 共5条，第1-5条 帮助 限定条件 学科主题：Physics, Applied     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 High frequency capacitance-voltage characterization of Al2O3/ZrO2/Al2O3 in fully depleted silicon-on-insulator metal-oxide-semiconductor capacitors 期刊论文 APPLIED PHYSICS LETTERS, 2003, 卷号: 83, 期号: 25, 页码: 5238-5240 Zhang, NL; Song, ZT; Shen, QW; Wu, YJ; Liu, QB; Lin, CL; Duo, XZ; Zheng, LR; Ding, YF; Zhu, ZQ 收藏  |  浏览/下载：8/0  |  提交时间：2012/03/24 ZRO2/SIO2/SI LAYERED STRUCTURE  THERMAL-STABILITY  MOS CAPACITORS  FILM  ZRO2  DIELECTRICS  HFO2   Defect and strain in hydrogen and helium coimplanted single-crystal silicon 期刊论文 JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2001, 卷号: 34, 期号: 1, 页码: 5-11 Duo, XZ; Liu, WL; Xing, S; Zhang, M; Fu, XR; Lin, CL; Hu, PG; Wang, SX; Wang, LM 收藏  |  浏览/下载：9/0  |  提交时间：2012/03/24 INDUCED EXFOLIATION  MECHANISM  CAVITIES  AU   Comparison between the different implantation orders in H+ and He+ coimplantation 期刊论文 JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2001, 卷号: 34, 期号: 4, 页码: 477-482 Duo, XZ; Liu, WL; Zhang, MA; Wang, LW; Lin, CL; Okuyama, M; Noda, M; Cheung, WY; Chu, PK; Hu, PG; Wang, SX; Wang, LM 收藏  |  浏览/下载：20/0  |  提交时间：2012/03/24 POSITRON-ANNIHILATION  INDUCED DEFECTS  SILICON  EXFOLIATION  MECHANISM  CAVITIES  AU   Evolution of hydrogen and helium co-implanted single-crystal silicon during annealing 期刊论文 JOURNAL OF APPLIED PHYSICS, 2001, 卷号: 90, 期号: 8, 页码: 3780-3786 Duo, XH; Liu, WL; Zhang, M; Wang, LW; Lin, CL; Okuyama, M; Noda, M; Cheung, WY; Wong, SP; Chu, PK; Hu, PG; Wang, SX; Wang, LM 收藏  |  浏览/下载：12/0  |  提交时间：2012/03/24 INDUCED EXFOLIATION  INDUCED DEFECTS  COIMPLANTATION  MECHANISM  CAVITIES  AU   Comparison of Cu gettering to H+ and He+ implantation-induced cavities in separation-by-implantation-of-oxygen wafers 期刊论文 JOURNAL OF APPLIED PHYSICS, 1999, 卷号: 85, 期号: 1, 页码: 94-98 Zhang, MA; Lin, CL; Duo, XZ; Lin, ZX; Zhou, ZY 收藏  |  浏览/下载：17/0  |  提交时间：2012/03/25 ION-IMPLANTATION  SILICON-OXIDES  COPPER  TECHNOLOGY  BREAKDOWN  NICKEL  CARBON