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Comparison of 2D Hybrid Simulational and Experimental Results for Dual-Frequency Capacitively Coupled Argon Plasmas 期刊论文
PLASMA SCIENCE & TECHNOLOGY, 2011, 卷号: 13, 页码: 181-187
作者:  Bi Zhenhua;  Xu Xiang;  Liu Yongxin;  Jiang Xiangzhan;  Lu Wenqi
收藏  |  浏览/下载:15/0  |  提交时间:2019/12/18


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