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Influence of high-dose nitrogen implantation on the positive charge density of the buried oxide of silicon-on-insulator wafers 期刊论文
Acta physica sinica, 2011, 卷号: 60, 期号: 5, 页码: 6
作者:  Tang Hai-Ma;  Zheng Zhong-Shan;  Zhang En-Xia;  Yu Fang;  Li Ning
收藏  |  浏览/下载：24/0  |  提交时间：2019/05/12
Influence of high-dose nitrogen implantation on the positive charge density of the buried oxide of silicon-on-insulator wafers 期刊论文
acta physica sinica, 2011, 卷号: 60, 期号: 5, 页码: article no.56104
作者:  Yu F
收藏  |  浏览/下载：93/6  |  提交时间：2011/07/06
Influence of nitrogen implantation into the buried oxide on the radiation hardness of silicon-on-insulator wafers 期刊论文
Chinese physics b, 2010, 卷号: 19, 期号: 10, 页码: 6
作者:  Tang Hai-Ma;  Zheng Zhong-Shan;  Zhang En-Xia;  Yu Fang;  Li Ning
收藏  |  浏览/下载：104/0  |  提交时间：2019/05/12
Research on nitrogen implantation energy dependence of the properties of SIMON materials 期刊论文
nuclear instruments & methods in physics research section b-beam interactions with materials and atoms, 2006, 卷号: 242, 期号: 1-2, 页码: 585-587
Zhang EX; Sun JY; Chen J; Chen M; Zhang ZX; Li N; Zhang GQ; Wang X
收藏  |  浏览/下载：285/0  |  提交时间：2010/04/11
Research on nitrogen implantation energy dependence of the properties of SIMON materials 会议论文
14th international conference on ion beam modification of materials (ibmm 2004), pacific grove, ca, sep 05-10, 2004
Zhang EX; Sun JY; Chen J; Chen M; Zhang ZX; Li N; Zhang GQ; Wang X
收藏  |  浏览/下载：215/45  |  提交时间：2010/03/29
Radiation hardness improvement of separation-by-implantation-of-oxygen/silicon-on-insulator material by nitrogen ion implantation 期刊论文
journal of electronic materials, 2005, 卷号: 34, 期号: 11, 页码: l53-l56
Zhang EX; Sun JY; Chen J; Zhang ZX; Wang X; Li N; Zhang GQ; Liu ZL
收藏  |  浏览/下载：193/29  |  提交时间：2010/03/17
Magnetic properties of mn-implanted n-type ge 期刊论文
Journal of crystal growth, 2004, 卷号: 273, 期号: 1-2, 页码: 106-110
作者:  Liu, LF;  Chen, NF;  Chen, CL;  Li, YL;  Yin, ZG
收藏  |  浏览/下载：18/0  |  提交时间：2019/05/12
Investigation of mn-implanted n-type ge 期刊论文
Journal of crystal growth, 2004, 卷号: 265, 期号: 3-4, 页码: 466-470
作者:  Liu, LF;  Chen, NF;  Yin, ZG;  Yang, F;  Zhou, JP
收藏  |  浏览/下载：20/0  |  提交时间：2019/05/12
Silicon-on-insulating multi-layers for total-dose irradiation hardness 期刊论文
chinese physics letters, 2004, 卷号: 21, 期号: 8, 页码: 1600-1603
Zhang EX; Yi WB; Liu XH; Chen M; Liu ZL; Xi W
收藏  |  浏览/下载：379/54  |  提交时间：2010/03/09
Formation of total-dose-radiation hardened materials by sequential oxygen and nitrogen implantation and multi-step annealing 期刊论文
semiconductor science and technology, 2004, 卷号: 19, 期号: 5, 页码: 571-573
Yi WB; Zhang EX; Chen M; Li N; Zhang GQ; Liu ZL; Wang X
收藏  |  浏览/下载：179/57  |  提交时间：2010/03/09
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