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浏览/检索结果: 共5条，第1-5条 帮助 限定条件 专题：清华大学    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Design and fabrication of a novel Si MOS pressure microsensor 期刊论文 2010, 2010 Zhang Yan-hong; Liu Li-tian; Zhang Zhao-hua; Lin Hui-wang 收藏  |  浏览/下载：2/0 Design and fabrication of silicon integrated sensor chip used for TPMS 期刊论文 2010, 2010 Zhang Zhao-hua; Liu Bing-wu; Zhang Yan-hong; Tan Zhi-min; Lin Hui-wang; Liu Li-tian 收藏  |  浏览/下载：2/0 Design and fabrication of a novel silicon piezoresistive pressure microsensor for TPMS 期刊论文 2010, 2010 Zhang Yan-hong; Liu Bing-wu; Liu Li-tian; Zhang Zhao-hua; Tan Zhi-min; Lin Hui-wang 收藏  |  浏览/下载：3/0 Analysis and design of an accelerometer fabricated with porous silicon as sacrificial layer 期刊论文 2010, 2010 Zhou Jun; Wang Xiaohong; Yao Pengjun; Dong Liang; Liu Litian 收藏  |  浏览/下载：4/0 Design and optimization of SOI piezoresistive microcantilever sensors for use in surface stress measurement 期刊论文 2010, 2010 Zhuang Zhiwei; Wang Zheyao; Liu Litian 收藏  |  浏览/下载：1/0