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	Design and fabrication of silicon integrated sensor chip used for TPMS
	Zhang Zhao-hua ; Liu Bing-wu ; Zhang Yan-hong ; Tan Zhi-min ; Lin Hui-wang ; Liu Li-tian
	2010-05-07 ; 2010-05-07
关键词	Practical/ monolithic integrated circuits piezoresistive devices pressure sensors temperature sensors tyres/ silicon integrated sensor chip TPMS tire pressure monitor system piezoresistive pressure sensor temperature sensor piezoresistive effect stress distribution/ A0670D Sensing and detecting devices A0630N Pressure measurement A0720D Thermometry B7230 Sensing devices and transducers B7320V Pressure and vacuum measurement B7320R Thermal variables measurement B2570 Semiconductor integrated circuits
中文摘要	A sensor chip for tire pressure monitor system (TPMS) was designed and fabricated, which consist of piezoresistive pressure sensor and temperature sensor. According to the requirement of the full scale, a high proportion of thickness and area of the diaphragm is used. This design results in the high stress area spread outside of the diaphragm, a high sensitivity of the sensor is achieved. High concentration injection is used for lower zero output.
语种	中文 ; 中文
出版者	Southeast Univ ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16505]
专题	清华大学
推荐引用方式 GB/T 7714	Zhang Zhao-hua,Liu Bing-wu,Zhang Yan-hong,et al. Design and fabrication of silicon integrated sensor chip used for TPMS[J],2010, 2010.
APA	Zhang Zhao-hua,Liu Bing-wu,Zhang Yan-hong,Tan Zhi-min,Lin Hui-wang,&Liu Li-tian.(2010).Design and fabrication of silicon integrated sensor chip used for TPMS..
MLA	Zhang Zhao-hua,et al."Design and fabrication of silicon integrated sensor chip used for TPMS".(2010).

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