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	Design and fabrication of a novel silicon piezoresistive pressure microsensor for TPMS
	Zhang Yan-hong ; Liu Bing-wu ; Liu Li-tian ; Zhang Zhao-hua ; Tan Zhi-min ; Lin Hui-wang
	2010-05-07 ; 2010-05-07
关键词	New Development Practical/ microsensors piezoresistive devices pressure sensors tyres/ silicon piezoresistive pressure microsensor TPMS tire pressure monitoring system tire pressure sensors thick silicon diaphragms meander shape piezoresistors 1000 kPa 30 micron 370 micron 470 micron/ A0670D Sensing and detecting devices A0710C Micromechanical devices and systems A0630N Pressure measurement B7230M Microsensors B2575D Design and modelling of micromechanical devices B2575F Fabrication of micromechanical devices B7320V Pressure and vacuum measurement/ pressure 1.0E+06 Pa size 3.0E-05 m size 3.7E-04 m size 4.7E-04 m
中文摘要	With the huge market-demand of TPMS (tire pressure monitoring system) application, new tire pressure sensors with miniature size, high performance and low cost have been highly desired. Series of novel piezoresistive pressure microsensors have been designed, fabricated and tested, which use 30 mu m thick silicon diaphragms with novel meander shape piezoresistors and placing style. Relationships between major performance parameters including the sensitivity and linearity and the diaphragm area, piezoresistor shape as well as placing method are analyzed systematically. The sensitivity and linearity of two kind 1000kPa full-scale pressure microsensors (370 mu m*370 mu m and 470 mu m*470 mu m) are 15.5 mV/V middot FS, 0.012%/FS, and 32.2 mV/V middot FS, 0.078%/FS, respectively. These microsensors have small size, high yield, high sensitivity and high linearity, which can be used in TPMS, medicine, aerospace as well as many other applications.
语种	中文 ; 中文
出版者	Southeast Univ ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16467]
专题	清华大学
推荐引用方式 GB/T 7714	Zhang Yan-hong,Liu Bing-wu,Liu Li-tian,et al. Design and fabrication of a novel silicon piezoresistive pressure microsensor for TPMS[J],2010, 2010.
APA	Zhang Yan-hong,Liu Bing-wu,Liu Li-tian,Zhang Zhao-hua,Tan Zhi-min,&Lin Hui-wang.(2010).Design and fabrication of a novel silicon piezoresistive pressure microsensor for TPMS..
MLA	Zhang Yan-hong,et al."Design and fabrication of a novel silicon piezoresistive pressure microsensor for TPMS".(2010).

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