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科研机构
半导体研究所 [33]
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期刊论文 [28]
会议论文 [5]
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2015 [1]
2011 [4]
2010 [2]
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2008 [2]
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半导体材料 [33]
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Effect of Growth Pressure on Epitaxial Graphene Grown on 4H-SiC Substrates by Using Ethene Chemical Vapor Deposition
期刊论文
materials, 2015, 卷号: 8, 期号: 9, 页码: 5586-5596
Shuxian Cai
;
Zhonghua Liu
;
Ni Zhong
;
Shengbei Liu
;
Xingfang Liu
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2016/03/29
Effect of gas pressure on the properties of silicon thin film
期刊论文
gongneng cailiao/journal of functional materials, 2011, 卷号: 42, 期号: 8, 页码: 1489-1491
Hao, Hui-Ying
;
Li, Wei-Min
;
Zeng, Xiang-Bo
;
Kong, Guang-Lin
;
Liao, Xian-Bo
收藏
  |  
浏览/下载:44/0
  |  
提交时间:2012/06/14
Amorphous films
Chemical vapor deposition
Deposition
Microcrystalline silicon
Microstructure
Photoelectricity
Plasma deposition
Plasma enhanced chemical vapor deposition
Pressure effects
Semiconducting silicon compounds
Transport properties
Electrical transport properties of the Si-doped cubic boron nitride thin films prepared by in situ cosputtering
期刊论文
journal of applied physics, 2011, 卷号: 109, 期号: 2, 页码: article no.23716
作者:
Yin ZG
;
Zhang XW
;
Tan HR
;
Fan YM
;
Zhang SG
收藏
  |  
浏览/下载:42/3
  |  
提交时间:2011/07/05
HIGH-PRESSURE SYNTHESIS
VAPOR-DEPOSITION
NUCLEATION
EMISSION
DIAMOND
GROWTH
Optimized growth of p-type AlGaN electron blocking layer in the GaN-based LED
期刊论文
acta physica sinica, 2011, 卷号: 60, 期号: 1, 页码: article no.16108
Wang B
;
Li ZC
;
Yao R
;
Liang M
;
Yan FW
;
Wang GH
收藏
  |  
浏览/下载:93/5
  |  
提交时间:2011/07/05
GaN-based
LED
Al composition
electron blocking layer
TEMPERATURE
ALLOYS
MOVPE
Effect of annealing process on the surface roughness in multiple Al implanted4H-SiC
期刊论文
journal of semiconductors, 2011, 卷号: 32, 期号: 7, 页码: 72002
Wu, Hailei
;
Sun, Guosheng
;
Yang, Ting
;
Yan, Guoguo
;
Wang, Lei
;
Zhao, Wanshun
;
Liu, Xingfang
;
Zeng, Yiping
;
Wen, Jialiang
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2012/06/14
Aluminum
Annealing
Ion implantation
Pressure effects
Semiconducting silicon compounds
Silicon carbide
Surface roughness
Optimization of inductively coupled plasma etching for low nanometer scale air-hole arrays in two-dimensional GaAs-based photonic crystals
期刊论文
journal of semiconductors, 2010, 卷号: 31, 期号: 1, 页码: 012003-1-012003-5
作者:
Ye Xiaoling
;
Xu Bo
;
Jin Peng
;
Peng Yinsheng
;
Ye Xiaoling
收藏
  |  
浏览/下载:33/0
  |  
提交时间:2011/08/16
A study of indium incorporation in In-rich InGaN grown by MOVPE
期刊论文
applied surface science, 2010, 卷号: 256, 期号: 10, 页码: 3352-3356
作者:
Wei HY
;
Song HP
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  |  
浏览/下载:139/13
  |  
提交时间:2010/04/22
MOVPE
In-rich InGaN
Indium incorporation
MOLECULAR-BEAM EPITAXY
CHEMICAL-VAPOR-DEPOSITION
CRITICAL THICKNESS
DROPLET FORMATION
PHASE-SEPARATION
TEMPERATURE
FILMS
HETEROSTRUCTURES
IMMISCIBILITY
INXGA1-XN
Growth and characterization of GaInNAs by molecular beam epitaxy using a nitrogen irradiation method
期刊论文
journal of crystal growth, 2009, 卷号: 311, 期号: 7, 页码: 1723-1727
Zhao H
;
Wang SM
;
Zhao QX
;
Sadeghi M
;
Larsson A
收藏
  |  
浏览/下载:180/35
  |  
提交时间:2010/03/08
Quantum well
Dilute nitride
Rapid thermal annealing
InGaAs
GaInNAs
Improvement in crystal quality of ZnO film on Si substrate by using a homo-buffer layer
期刊论文
materials science in semiconductor processing, 2009, 卷号: 12, 期号: 6, 页码: 233-237
作者:
Zhao J
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  |  
浏览/下载:43/4
  |  
提交时间:2011/07/05
ZnO
Pulsed laser deposition
X-ray diffraction
Photoluminescence
Reflection high-energy electron diffraction
PULSED-LASER DEPOSITION
THIN-FILMS
PLD TECHNIQUE
GROWTH
SAPPHIRE
TEMPERATURE
Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films From the Load-Deflection of Long Si3N4 and SiO2/Si3N4 Diaphragms
期刊论文
journal of microelectromechanical systems, 2008, 卷号: 17, 期号: 5, 页码: 1120-1134
Yang, JL
;
Gaspar, J
;
Paul, O
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  |  
浏览/下载:24/0
  |  
提交时间:2010/03/08
Bulge test
fracture
pooled Weibull analysis
silicon nitride (Si3N4)
silicon oxide (SiO2)
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