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Analysis of multi-e-beam lithography for cutting layers at 7-nm node 期刊论文
Journal of Micro/Nanolithography, MEMS, and MOEMS, 2016
作者:  Zhao LJ(赵利俊);  Wei YY(韦亚一);  Ye TC(叶甜春)
收藏  |  浏览/下载:7/0  |  提交时间:2017/05/09
Large area and deep sub-wavelength interference lithography employing odd surface plasmon modes 期刊论文
Scientific Reports, 2016, 卷号: 6
作者:  Liu, Liqin;  Luo, Yunfei;  Zhao, Zeyu;  Zhang, Wei;  Gao, Guohan
收藏  |  浏览/下载:20/0  |  提交时间:2016/10/27
Force Drift in Force Mode Dip-Pen Nanolithography 期刊论文
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2016, 卷号: 16, 期号: 7, 页码: 7030-7036
作者:  Yang, Haijun;  Zhang, Chen;  Zhang, Jinjin;  Zhang, Donghua;  Hu, Jun
收藏  |  浏览/下载:22/0  |  提交时间:2018/03/15
The steady flying of a plasmonic flying head over a photoresist-coated surface in a near-field photolithography system 期刊论文
NANOTECHNOLOGY, 2016, 卷号: 27, 期号: 18
作者:  Ji, Jiaxin;  Hu, Yueqiang;  Meng, Yonggang;  Zhang, Jun;  Xu, Jian
收藏  |  浏览/下载:24/0  |  提交时间:2017/01/23
Single-mode-resonance interference in photoresist sub-micron waveguide for high exposure depth nanolithography 期刊论文
MICROELECTRONIC ENGINEERING, 2016, 卷号: 154, 页码: 8-11
作者:  Yang, Zheng;  Zhang, Zhiyou;  Wu, Peng;  Xia, Liangping;  Yin, Shaoyun
收藏  |  浏览/下载:15/0  |  提交时间:2018/03/15
Gradient Permittivity Meta-Structure model for Wide-field Super-resolution imaging with a sub-45 nm resolution 期刊论文
scientific reports, 2016, 卷号: 6, 页码: 23460
作者:  Cao, Shun;  Wang, Taisheng;  Xu, Wenbin;  Liu, Hua;  Zhang, Hongxin
收藏  |  浏览/下载:21/0  |  提交时间:2016/04/21
Directed block copolymer self-assembly implemented via surface-embedded electrets 期刊论文
NATURE COMMUNICATIONS, 2016, 卷号: 7
作者:  Wu, Mei-Ling;  Wang, Dong;  Wan, Li-Jun
收藏  |  浏览/下载:13/0  |  提交时间:2017/01/23
Gradient Permittivity Meta-Structure model for Wide-field Super-resolution imaging with a sub-45 nm resolution 期刊论文
Scientific Reports, 2016, 卷号: 6
作者:  Cao, S.;  T. S. Wang;  W. B. Xu;  H. Liu;  H. X. Zhang
收藏  |  浏览/下载:16/0  |  提交时间:2017/09/11
New optical near-field nanolithography with optical fiber probe laser irradiating atomic force microscopy probe tip 会议论文
作者:  Cui, Jianlei;  Yang, Lijun;  Xie, Hui;  Wang, Yang;  Mei, Xuesong
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/02
Superresolution nanolithography technique based on polydimethylsiloxane soft mold 期刊论文
IEEE International Conference: 2016 6th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (IEEE 3M-NANO), 2016, 页码: 269-272
作者:  He, Chuanwang;  Dong, Xiaochun;  Wang, Pinghe
收藏  |  浏览/下载:18/0  |  提交时间:2018/06/14


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