Surface Defect Detection on Optical Devices Based on Microscopic Dark-Field Scattering Imaging

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	Surface Defect Detection on Optical Devices Based on Microscopic Dark-Field Scattering Imaging
	Yin, Yingjie; Xu, De; Zhang, Zhengtao; Bai, Mingran; Zhang, Feng; Tao, Xian; Wang, Xingang
刊名	STROJNISKI VESTNIK-JOURNAL OF MECHANICAL ENGINEERING
	2015
卷号	61 期号:1 页码:24-32
关键词	scale invariance feature transform linear discriminant function cluster algorithm image segmentation image mosaic dark-field imaging optical devices
英文摘要	Methods of surface defect detection on optical devices are proposed in this paper. First, a series of microscopic dark-field scattering images were collected with a line-scan camera. Translation transformation between overlaps of adjacent microscopic dark-field scattering images resulted from the line-scan camera's imaging feature. An image mosaic algorithm based on scale invariance feature transform (SIFT) is proposed to stitch dark-field images collected by the line-scan camera. SIFT feature matching point-pairs were extracted from regions of interest in the adjacent microscopic dark-field scattering images. The best set of SIFT feature matching point-pairs was obtained via a parallel clustering algorithm: The transformation matrix of the two images was calculated by the best matching point-pair set, and then image stitching was completed through transformation matrix. Secondly, a sample threshold segmentation method was used to segment dark-field images that were previously stitched together because the image background was very dark. Finally, four different supervised learning classifiers are used to classify the defect represented by a six-dimensional feature vector by shape (point or line), and the performance of linear discriminant function (LDF) classifier is demonstrated to be the best. The experimental results showed that defects on optical devices could be detected efficiently by the proposed methods.
WOS标题词	Science & Technology ; Technology
类目[WOS]	Engineering, Mechanical
研究领域[WOS]	Engineering
关键词[WOS]	CLASSIFIER ; RECOGNITION ; SIMULATION ; ROUGHNESS
收录类别	SCI
语种	英语
WOS记录号	WOS:000348968600002
内容类型	期刊论文
源URL	[http://ir.ia.ac.cn/handle/173211/8066]
专题	精密感知与控制研究中心_精密感知与控制
作者单位	Chinese Acad Sci, Inst Automat, Res Ctr Precis Sensing & Control, Beijing, Peoples R China
推荐引用方式 GB/T 7714	Yin, Yingjie,Xu, De,Zhang, Zhengtao,et al. Surface Defect Detection on Optical Devices Based on Microscopic Dark-Field Scattering Imaging[J]. STROJNISKI VESTNIK-JOURNAL OF MECHANICAL ENGINEERING,2015,61(1):24-32.
APA	Yin, Yingjie.,Xu, De.,Zhang, Zhengtao.,Bai, Mingran.,Zhang, Feng.,...&Wang, Xingang.(2015).Surface Defect Detection on Optical Devices Based on Microscopic Dark-Field Scattering Imaging.STROJNISKI VESTNIK-JOURNAL OF MECHANICAL ENGINEERING,61(1),24-32.
MLA	Yin, Yingjie,et al."Surface Defect Detection on Optical Devices Based on Microscopic Dark-Field Scattering Imaging".STROJNISKI VESTNIK-JOURNAL OF MECHANICAL ENGINEERING 61.1(2015):24-32.