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Soft X-ray emission from molybdenum plasmas generated by dual laser pulses 期刊论文
APPLIED PHYSICS LETTERS, 2016, 卷号: 109, 期号: 1-19
作者:  Lokasani, R;  Arai, G;  Kondo, Y;  Hara, H;  Dinh, TH
收藏  |  浏览/下载:3/0  |  提交时间:2017/05/09
Sources for beyond extreme ultraviolet lithography and water window imaging 期刊论文
PHYSICA SCRIPTA, 2015, 卷号: 90, 期号: 5
作者:  O'Sullivan, G;  Li, BW;  Dunne, P;  Hayden, P;  Kilbane, D
收藏  |  浏览/下载:5/0  |  提交时间:2017/01/13
Spectroscopy for identification of plasma sources for lithography and water window imaging 会议论文
29th International Conference on Photonic, Electronic, and Atomic Collisions (ICPEAC), Toledo, SPAIN, JUL 22-28, 2015
作者:  O'Sullivan, G;  Dunne, P;  Higashiguchi, T;  Li, BW;  Liu, LN
收藏  |  浏览/下载:3/0  |  提交时间:2017/01/20
Spectroscopy for identification of plasma sources for lithography and water window imaging 会议论文
29th International Conference on Photonic, Electronic, and Atomic Collisions (ICPEAC), Toledo, SPAIN, JUL 22-28, 2015
作者:  O'Sullivan, G;  Dunne, P;  Higashiguchi, T;  Li, BW;  Lokasani, R
收藏  |  浏览/下载:5/0  |  提交时间:2017/01/20


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