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Study on the optical characteristic of "black silicon" antireflection coating prepared by plasma immersion ion implantation 期刊论文
ACTA PHYSICA SINICA, 2012, 卷号: 61, 期号: 14, 页码: -
作者:  Liu, J;  Liu, BW;  Xia, Y;  Li, CB;  Liu, S
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