Study on the optical characteristic of "black silicon" antireflection coating prepared by plasma immersion ion implantation

	Study on the optical characteristic of "black silicon" antireflection coating prepared by plasma immersion ion implantation
	Liu, J; Liu, BW; Xia, Y; Li, CB; Liu, S
刊名	ACTA PHYSICA SINICA
	2012-07
卷号	61 期号:14 页码:-
关键词	plasma immersion ion implantation refractive index antireflection coating black silicon
ISSN号	1000-3290
通讯作者	Liu, J (reprint author), Lanzhou Univ, Sch Phys Sci & Technol, Inst Microelect, Lanzhou 730000, Peoples R China.
学科主题	Physics
语种	中文
WOS记录号	WOS:000307422900057
内容类型	期刊论文
源URL	[http://202.201.7.4/handle/262010/105593]
专题	物理科学与技术学院_期刊论文
推荐引用方式 GB/T 7714	Liu, J,Liu, BW,Xia, Y,et al. Study on the optical characteristic of "black silicon" antireflection coating prepared by plasma immersion ion implantation[J]. ACTA PHYSICA SINICA,2012,61(14):-.
APA	Liu, J,Liu, BW,Xia, Y,Li, CB,&Liu, S.(2012).Study on the optical characteristic of "black silicon" antireflection coating prepared by plasma immersion ion implantation.ACTA PHYSICA SINICA,61(14),-.
MLA	Liu, J,et al."Study on the optical characteristic of "black silicon" antireflection coating prepared by plasma immersion ion implantation".ACTA PHYSICA SINICA 61.14(2012):-.