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Investigation of damage behaviour and isolation effect of n-type 6H-SiC by implantation of oxygen 期刊论文
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2000, 卷号: 33, 期号: 12, 页码: 1551-1555
Wang, LW; Huang, JP; Duo, XZ; Song, ZT; Lin, CL; Zetterling, CM; Ostling, M
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