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Effect of ion flux on recrystallization and resistance lowering in phosphorus-implanted (0001)-oriented 4H-SiC 期刊论文
chinese physics, 2005, 卷号: 14, 期号: 3, 页码: 599-603
Xin G; Sun, GS; Li JM; Zhang YX; Lei W; Zhao WS; Zeng YP
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