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The radiation hardness of the nitrogen-fluorine implanted buried oxide layer in silicon-on-insulator materials against higher total dose irradiation. 期刊论文
SCIENCE CHINA Materials, 2016
作者:  Liu ZL(刘忠立);  Han ZS(韩郑生);  Luo JJ(罗家俊);  Zheng ZS(郑中山)
收藏  |  浏览/下载:13/0  |  提交时间:2017/05/08


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