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Comparative study of SOI/Si hybrid substrates fabricated using high-dose and low-dose oxygen implantation 期刊论文
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2004, 卷号: 37, 期号: 13, 页码: 1732-1735
Dong, YM; Chen, M; Chen, J; Wang, X; Wang, X
收藏  |  浏览/下载:11/0  |  提交时间:2012/03/24
Synthesis and thermal conductivity measurement of high-integrity ultrathin oxygen-implanted buried oxide layers 期刊论文
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 卷号: 43, 期号: 4B, 页码: 2185-2187
Dong, YM; Chen, J; Chen, M; Wang, X; He, P; Tian, LL; Liu, LT; Li, ZJ
收藏  |  浏览/下载:10/0  |  提交时间:2012/03/24
Dose-energy match for the formation of high-integrity buried oxide layers in low-dose separation-by-implantation-of-oxygen materials 期刊论文
APPLIED PHYSICS LETTERS, 2002, 卷号: 80, 期号: 5, 页码: 880-882
Chen, M; Wang, X; Chen, J; Liu, XH; Dong, YM; Yu, YH; Wang, X
收藏  |  浏览/下载:10/0  |  提交时间:2012/03/24


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